高分子微針頭陣列與應用

Polymer Micro Needle Array and its Application

黃恒赍(Heng-Chi Huang)

指導教授 ： 傅建中

國立清華大學/工學院/微機電工程研究所/碩士(2006年)

摘要

在傳統的LIGA製程中，主要是利用同步輻射光來進行模具的製作。然而，由於同步輻射光源得設備昂貴且稀少，許多的研究就利用紫外光取代同步輻射光來進行模具的製作。但由於紫外光奇波長較長且準直性不加，利用傳統正面曝光的方式所製作出來的模具，其微結構的容易變成頭大底小的形狀，此結構將不利於熱壓脫模的後續製程。在本論文中，作者提出了一種製程方法，可以輕易的製作出頭小底大的微結構，並且成功的應用於熱壓脫模的後製程。另外，利用此製程方法，也成功的製作出微針頭陣列、高深寬比微結構與神經探針。

關鍵字

傾斜角 ； 微針頭陣列 ； 高深寬比結構 ； 神經探針

並列摘要

A variety of novel drugs have been developed in the past ten years. It has opened out great efficiency in the treatment of a broad range of diseases. However, oral administration reduces the curative effects of some drugs due to the poor absorption or the deterioration in the digestive system. Delivering drugs directly into body using hypodermic injection causes lots of pain for patients while penetrating the needle into the skin. Patches with micro-needles array offering a possibility of efficient constant drug release without pain have a great potential in future.

In the past few years, many micro fabrication technologies have been applied to produce micro-needles including ICP/RIE, laser ablation, X-ray and metal/nitride deposition with sacrificial layer. However, they are either expensive or too complicated. In order to simplify the process and reduce the cost, we propose here a novel and simple method to fabricate high density hollow polymer micro-needle array.

In this proposal, we present firstly three different back side exposure methods which can produce different taper angles from 3o to 17o of side walls of microstructures. With the proper taper angles in the mold structure, normal contact pressure will be abated, this will facilitate the de-molding procedure and at the same time prevent the microstructures of mold from being damaged.

With a proper geometric design, solid micro-needles can be fabricated by these back side exposures. The fabricated needles can be integrated with micro-fluidic channels in the process simultaneously. By combining of different back side exposures in one lithography step, it is able to produce hollow micro-needles with a nearly vertical internal wall and a tapered outside wall. Different kinds of micro-needle arrays such as tip-opened, side-opened, large tapered angled…etc can be realized. We present in this proposal the theoretical considerations, simulations and the preliminary experiment results of this idea in detail.

Besides, the micro needle arrays can be produced on the top of a flexible membrane for compliant applications. They can be even replicated in different functional material like conductive metal, bio-degradable polymers…etc. These belongs the future works for specific applications.

並列關鍵字

taper angle ； micro needle array ； hiag aspect ratio structure ； neural probe

參考文獻

[1] Bruno Frazier et al., Surface micromachined metallic microneedles, J. MEMS, Vol. 12, No. 3, June 2003, 289-295

[2] Patrick Griss et al., Side-opened out-of-plane microneedles for microfluidic transdermal liquid transfer, J. MEMS, Vol. 12, No. 3, June 2003, 296-301

[3] Dorian Liepmann et al., Arrays of hollow out-of-plane microneedles for drug delivery, JMEMS, Vol. 14, No. 3, (2005), 472-478

[4] Mark G. Allen et al., Hollow metal microneedle for insulin delivery to diabetic rats, IEEE Transactions on biomedical engineering, Vol. 52, No. 5, May 2005.

[5] Seung S. Lee , A novel fabrication method of a microneedle array using inclined deep x-ray exposure, J. Micromech. Microeng. 15 No 5 (2005) 903-911