解耦合微型振動陀螺儀之設計與分析

Design and Analysis of Decoupled Vibratory Gyroscopes

蔡登宏(Deng-Horng Tsai)

指導教授 ： 方維倫

國立清華大學/工學院/動力機械工程學系/博士(2007年)

摘要

微機電系統(MEMS)技術開發之微型振動陀螺儀，因為具有超小尺寸、批次生產及整合機械結構與電路成為系統晶片(system on chip)等優勢，所以廣泛運用於汽車安全與導航系統、虛擬實境、無人飛機、自動化工業及醫療產業上；微型振動陀螺儀的操作原理是經由科氏力進行驅動件與感測件之間機械能的轉換，雖然利用的原理相同，但發展的型態卻是千變萬化，包含有環式(ring type)、音叉式(tuning fork type)及輪式(wheel type)等，隨著微機電加工製造技術不斷地進步，使得微型振動陀螺儀的機械性能不斷提升；雖然微型陀螺儀之機械性能取決於製程技術，但其機械解耦合的型態更與振動陀螺儀之性能息息相關，耦合情況愈嚴重，橫軸靈敏度(cross axis sensitivity)亦愈高；有鑑於此，本研究將進行完全解耦合z軸振動陀螺儀及兩種解耦合型態之同平面雙軸振動輪式陀螺儀的開發，期能滿足三軸角速率的量測，如再進一步整合三軸向加速儀，將可完成微型慣性量測單元(micro inertial measurement unit)的建構。

關鍵字

陀螺儀 ； 正交誤差 ； 解耦合 ； 橫軸

並列摘要

According to their compact size, batch production, and the integration of the mechanical structures with the electronics into a system chip, MEMS-based vibratory microgyroscopes can be widely used in the vehicle safety and navigation, virtual reality, unmanned aerial vehicles, automation, and medical industry. The operational principle is mainly based on the transfer of mechanical energy between a vibrating element and a sensing element through the Coriolis acceleration. Although the principle is the same, the design of microgyroscopes varies, such as ring type, tuning fork type and wheel type etc. Since the micromachining fabrication processes are dramatically improved, the mechanical performance of vibrating microgyroscope is promoting continuously. Normally, the mechanical performance of gyroscopes depends on manufacturing process. However, the mechanical decoupling design is more vitally related with the performance of gyroscopes. The more serious mechanical coupling is, the higher cross axis sensitivity will become. Therefore, this research will present a decoupled z-axis microgyroscope and two decoupled dual-axis vibrating wheel microgyroscopes. Combining z-axis gyroscope with dual-axis wheel gyroscope, the measurement of 3-axis angular rates could be realized. Once the 3-axis accelerometers could be further integrated, the construction of the micro inertial measurement unit will be fulfilled.

參考文獻

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