以微機電製程技術製作微探針於神經電信號量測之應用

MEMS based Microprobe for Neural Signals Measurement Application

張志偉(Chih-Wei Chang)

指導教授 ： 方維倫

國立清華大學/工學院/動力機械工程學系/碩士(2008年)

https://doi.org/10.6843/NTHU.2008.00299

摘要

本研究成功的製作出二種可用於記錄生物體神經電信號的神經探針。第一種是利用微機電製程技術以SOI晶片製作矽神經探針，並以螯蝦作為實驗動物證實其效能。接下來將元件背面沉積聚對二甲苯(parylene)這種高分子膜薄作為接合劑，使原本屬於二維的矽神經探針在低溫下組裝成三維的神經探針陣列。此外，由於玻璃是具有絕緣以及無晶格面特性的材料，因此本研究運用玻璃回熔技術來製作以玻璃為基材的玻璃神經探針，此神經探針可和穿透晶片式導線整合，未來可組裝成三維神經探針陣列。經由動物實驗證實，玻璃神經探針也可偵測到老鼠大腦的神經電信號。

關鍵字

微機電系統 ； 神經電信號 ； 神經探針 ； SOI 晶片 ； 玻璃回熔 ； 三維神經探針陣列

並列摘要

This study has successfully demonstrated a microprobe sensor for neural recording. The first Si based neural probe has been implemented on SOI (silicon-on-insulator) wafer and then employed to detect the neural signal of crayfish. Moreover, the polymer was deposited on the microprobe backside. This polymer layer acts as a bonding agent for microprobe assembly. Thus, the monolithic in-plane 2D probes can be further integrated to form 3D probe array at low temperature. Moreover, glass is a dielectric and amorphous material which is more suitable for microprobe. Therefore, this study also manufacture glass based neural probe by glass reflow process, this 2D microprobe has embedded silicon vias for vertical integration of chips to further realize 3D microprobe array. Successfully neural recording from rat brain is also demonstrated.

並列關鍵字

MEMS ； Neural signal ； Neural probe ； SOI wafer ； Glass reflow process ； 3D microprobe array

參考文獻

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