新型CMOS MEMS微光學定位、聚焦平台之設計與製造

Design and Fabrication of Novel CMOS MEMS Micro-Optical Positioning and Focusing Stages

楊智翔(Chih-Hsiang Yang)

指導教授 ： 方維倫 ； 傅建中

國立清華大學/工學院/奈米工程與微系統研究所/碩士(2008年)

https://doi.org/10.6843/NTHU.2008.00378

摘要

CMOS製程是半導體產業中的一套標準化製程平台，透過此標準製程，可以提高元件的產量及降低生產的成本，目前已大量被應用在IC產業中。而CMOS MEMS則是利用此一標準化程序，將製程中用來作為電性回路的導線層及中間夾雜的介電層製作微機電元件，此元件除了有先前提到的優點外，小線寬可製作更精確及更小的機械元件，且容易與感測電路結合，達到機電整合的優勢。
本研究利用此標準製程來製作Fresnel lens微聚焦透鏡，同時結合出平面及同平面熱致動器，期望達到焦點定位及焦距調變的微光學移動平台，進一步透過此基本架構，延伸出許多不同種類的微光學元件，製作出多功能的微光學平台，經由後續量測與分析，得到元件完整的聚焦特性及靜態行為，希望對未來相關領域的研究或應用能有所幫助。

關鍵字

CMOS MEMS ； Fresnel lens ； 熱致動器

並列摘要

This thesis presents a novel CMOS MEMS micro-optical stage. The stage contains a Fresnel lens in the center, and then combines in-plane and out-of-plane thermal actuators outside. Thus, the focal length can be tuned by out-of-plane thermal actuator, and focal point can be positioned by in-plane thermal actuator. Based on the fundamental framework, this study also extends other focusing lenses, like binary phase Fresnel lens, convex lens, and integrates polymer lens into Fresnel lens to be compound lens. The compound lens can change curvature by heating, further tune the focal length. By way of the following measurement and analysis, obtained complete focusing characteristics and static behavior, hoped that can have assistance in related researches or applications in the future.

並列關鍵字

CMOS MEMS ； Fresnel lens ； thermal actuator

參考文獻

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