A Data Mining and Time Series Integrated Approach for Analyzing Semiconductor MES and FDC Data to Enhance Overall Usage Effectiveness

整合資料挖礦和時間序列以分析半導體製造執行系統和事故預測及分類系統資料以提升綜合使用效益之研究

亞歷杭德拉(Alejandra Campero Diaz)

指導教授 ： 簡禎富

國立清華大學/工學院/工業工程與工程管理學系/碩士(2008年)

https://doi.org/10.6843/NTHU.2008.00406

摘要

Wafer fabrication is a complex, costly and lengthy process that involves hundreds of process steps with monitoring of the corresponding process parameters at the same time to enhance the yield. Large amount of data is automatically collected during these processes in wafer fabrication facility. Thus, potential useful information can be extracted from huge data sources to enhance decision quality and enhance operational effectiveness. This study aims to develop a framework to integrate FDC and MES data and then propose an approach based on data mining and time series techniques to investigate the data in order to enhance the overall usage effectiveness (OUE) for cost reduction. We validated this approach with an empirical study in a semiconductor company in Taiwan and the results demonstrated the practical viability of this approach. The extracted information and knowledge is helpful to engineers for identifying the major tools factors affecting indirect material usage effectiveness as well as for indentify periods of time when a specific tool is working using either low or high quantity of material.

關鍵字

Overall usage effectiveness ； Data mining ； Decision tree ； Clustering ； Time series ； Indirect material usage ； Semiconductor manufacturing

並列摘要

HASH(0x1b8e15a0)

並列關鍵字

HASH(0x1b8e1130) ； HASH(0x1b8e11d0) ； HASH(0x1b8e1270) ； HASH(0x1b8e1310) ； HASH(0x1b8e13b0) ； HASH(0x1b8e1450) ； HASH(0x1b8e14c0)

參考文獻

Berry, Michael J.A., and Gordon S. Linoff (2004), “Data Mining techniques: For Marketing, Sales, and Customer Relationship Management”, Wiley Publishing, Inc., Indianapolis, Indiana.

Braha, Dan, and Armin Shmilovici (2003), “On the use of Decision Tree Induction for Discovery of Interactions in a Photolithographic Process”, IEEE Transactions on Semiconductor Manufacturing, 16(4):644-652.

Chang, Yung-Cheng, and Fan-Tien Cheng (2006), “Manufacturability of Multivariate Applications in the Semiconductor Industry”, 2006 IEEE, International Conference on Automation Science and Engineering.

Chen, Mao-Shiung, T.F. Yen, Barry Coonan (2004), “Real-time Fault Detection and Classification for Manufacturing Etch Tools”, 2004 Institute of Electrical and Electronics Engineers (IEEE).

Chien, Chen-Fu and C. Hsu (2006), “A novel method for determining machine subgroups and backups with an empirical study for semiconductor manufacturing,” Journal of Intelligent Manufacturing, 17, 429-440.