- 學位論文
製程排氣白煙問題分析及改善之研究-以某半導體廠為例
The investigation and improvement of abnormal white smoke from the exhaust system in a semiconductor plant
摘要
廢氣處理系統中白煙異常排放是半導體及光電廠常見的困擾，除了造成民眾抱怨陳情外，情況嚴重極可能造成不透光率超過20%，違反「固定污染源空氣污染物排放標準」規定，不僅將遭受主管機關限期改善、停工或罰款等處分外，更嚴重影響公司形象，有鑒於此，半導體及光電廠莫不藉由各種改善運轉效率的技術層面的方式來解決白煙問題。 本研究係以半導體廠為研究案例，針對空污防治設備之酸/毒排氣系統進行探討及改善，藉此降低白煙異常排放問題。本研究運用問題解決型品質改善的邏輯架構，在不同的步驟中搭配品質管制手法，逐項層別分析，找出造成本研究案例白煙異常排放的三大主因：局部尾氣處理系統處理效率不佳、外包人員未依標準操作程序保養局部尾氣處理系統及局部尾氣處理系統異常，人員未及時修復。 本研究結果顯示，在經由工程面及管理面的改善後，除了有效降低白煙異常排放外，亦可降低運轉成本，有效減少漏酸，廢氣外洩等工安危害。
並列摘要
Abnormal emission of white smoke in exhaust system is the common problem in semiconductors and TFT-LCD plants. In addition to cause people complaint and petition, abnormal white smoke might cause the opacity rate exceeding to 20 percent which is against the provisions of the “stationary sources of air pollutants emission standards”. White smoke problems bring about government penalties, such as forcing the factory to make improvements within limited time, plant shutdown and fines. Furthermore, it will seriously damage company image. Therefore, all semiconductors and TFT-LCD plants are working hard to solve the problems of white smoke in various technical ways. In this study, a semiconductor plant was taken as a case study to investigate and improve the air pollution control equipment with regard to acid / toxic exhaust system in order to reduce the abnormal white smoke emission problems. In this study, “problem-solving type” of the logical architecture of the QC Story was applied. Step by step with the itemized layer, three main reasons were identified: 1) The Local Scrubber processed in poor efficiency, 2) Outsourcing personnel failed SOP when they maintain the Local Scrubber, and 3) The staffs did not promptly repair when the Local Scrubber went extraordinary. The results of this study revealed that improvements in engineering and management not only effectively reduce white smoke abnormal emission but also reduce operation cost and the occupational hazards such as leakage of acid and waste gas.