探討差分干涉顯微術量測特定形狀的透明待測物之表面形貌

Three-dimensional topography measurement for transparent object with specific profile by Phase shifting Differential Interference Contrast Microscopy (PS-DIC)

徐意晴(Yi-Ching Hsu)

指導教授 ： 林士傑

國立清華大學/工學院/動力機械工程學系/碩士(2013年)

摘要

近年來光電產品的使用越來越大眾化，其中各種具備顯示器的光電產品像是電腦螢幕、手機、PDA、數位相機、平板電腦等等的需求與使用量逐年增加。而這類元件由於材料透明且尺寸較小，一般的量測方法並不適用於此。在先前的研究中，已經驗證了差分干涉對比顯微術(Differential Interference Contrast Microscopy, 以下簡稱：PS-DIC)用於量測透明材質元件高度的可行性。然而，要將此技術應用在生產線上，必須要探討更多不同待測物的量測效果。
本研究探討系統對於不同外貌的透形待測物量測可行性，我們設定的待測物為具有傾斜面的梯形待測物及圓弧形待測物。首先，以軟體模擬分析系統量測條件極限及準確範圍，分析重建結果及誤差原因並提出修正方法。最後再以穿透式架構的PS-DIC量測系統量測透明材質的薄膜電晶體玻璃基板及弧形壓印試片，以驗證模擬結果及探討本差分干涉系統用於量測透明材質的梯形待測物及弧形待測物的可行性。

關鍵字

差分干涉對比術 ； 表面形貌量測 ； 透明待測物 ； 定量化相位還原

並列摘要

Due to the fact that opto-electronic products have become more and more popular in recent years, the demand for displays used in computer monitors, mobile phones, PDAs, digital cameras and tablet PCs has continued to increase significantly. General methods of measurement are not particularly suitable for these objects, which are often transparent and small.
The previous study has shown that PS-DIC (phase shifting differential interference contrast interferometer) can be used to measure the profile of transparent specimen with inclined surfaces. However, to apply this technology within the actual production, we must consider more complex geometry measurements with quantitative DIC techniques.

In this study, we aim to verify the feasibility of measuring specimens with different profiles, such as trapezoid objects with inclined surfaces and elliptic specimens. Software simulation system was first used to analyze the cause of reconstruction errors, and a method to amend such errors is consequently applied. Next, we set a transmitted PS-DIC measurement system to verify the simulation. The result can provide useful information to improve the accuracy of PS-DIC.

並列關鍵字

Differential Interference Contrast(DIC) ； surface profile ； transparent objects ； quantitative phase restoration

參考文獻

[1] 劉俊葳,“利用滾筒微壓印技術製作高效率顯示器用之次波長結構導光棒” 國立清華大學動力機械工程研究所碩士論文

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[6] 林文泉 ,“三維形貌高速量測-二步相位移式差分干涉對比顯微術為例”, 國立清華大學動力機械工程研究所碩士論文(2012)

[9] 陳偉倫,“探討待測物表面型貌對於差分干涉對比術量測的影響”,國立清華大學動力機械工程研究所碩士論文 (2011).