微型可調變近紅外光濾波器製作與研究

Design and Fabrication of Tunable MEMS-Based Fabry- Pérot Filter on NIR Wavelength

王羽榛(Yu-Chen Wang)

指導教授 ： 吳孟奇 ； 何充隆

國立清華大學/電機資訊學院/電子工程研究所/碩士(2014年)

摘要

隨著人類科技文明的進步，手機通訊已成人們生活中無可缺少的必需品，而近年來，樂活養生的風潮興起，人們亦開始注意居住飲食及生活品質。近紅外光在物質檢測上有著相當不錯的鑑別度，藉此，近紅外光檢測可應用於生活環境(如塑膠)及人體(如血糖)檢測上。
本論文研究以類共振腔的原理，在矽基板上採用微光機電製程技術(MOMES)，實現可經由電壓調變波段之近紅外光Fabry-Pérot濾波器(FPF)。此一微型近紅外光濾波器搭配近紅外光感測器，研製可搭載於行動智慧裝置之微型近紅外光檢測模組。
近紅外光於人體檢測上有相當不錯的準確性，利用此微型可調變近紅外光濾波器結合感測器，可應用於健康照護之生醫領域，將有不錯的效益及經濟價值。

關鍵字

法布立－培若濾波器 ； 微機電 ； 近紅外光

並列摘要

In recent year, the quality of life draws more and more attention, which people begin to care about details of daily life. On the other hand, with the increase of technology level, the mobile devices like smartphone are easily used in daily life. In addition, the sensor of near-infrared (NIR) wavelength has great accuracy on examined technology. Because of paying more attention to our living days, the NIR detector has an excellent potential to be put in use in our life like plastics test or bioinstrumentation and so on.
This study describes the design and fabrication of wavelength-tunable MEMS-based band-pass filter on silicon which it changes the air gap by voltage.

並列關鍵字

Fabry-Pérot Filter ； MEMS ； NIR

參考文獻

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