高速免致冷砷化鋁銦鎵量子井雷射之研製

隨著網路使用的普及，使用者對頻寬的需求日益增加，能提供高速寬頻的光纖網路架構勢必為人類社會未來主要的資訊傳輸系統。然而，由於目前使用光纖網路的成本過高，所以光纖系統仍未普及。若以一顆能高速調變並且便宜的雷射二極體來做為訊號光源，將可以降低使用光纖網路的成本，進而加速光纖世代的來臨。本實驗成功地發展出一種嶄新的技術來製作高速免致冷雷射二極體，此製程步驟相對簡單、便宜，並且可以製作出調變特性相當良好的邊射型脊狀雷射二極體。我們將此技術與另外兩種傳統製程做比較，新技術製作出的雷射二極體在注入電流為50mA時所能達到的9.7GHz頻寬(–3dB)遠比其他的製程高出許多。為了更加了解此製程所具備的優勢，我們將所有的雷射樣本做雙埠網路動態S參數之S11量測。在量測中我們成功地應用了數值方法來解決動態阻抗不匹配的問題，並且從S11參數中得出各寄生參數。我們發現新製程的外部RC參數皆較傳統製程低許多，推論此外部RC參數所造成的時間常數即為雷射二極體調變頻寬的主要限制因素。藉由更進一步的製程參數最佳化，我們相信此技術必能很快地應用在量產上，生產高性能且便宜的雷射。

關鍵字

製程；免致冷；砷化鋁銦鎵；量子井；高速；雷射二極體

並列摘要

Due to the large mass of data bytes, network users demand more and more bandwidth. High speed and broadband optical fiber communication system must be the major data transfer structure in the future. However, it is expensive so the optical fiber communication system is not popularized. We have developed a novel technique to fabricate high speed and uncooled ridge laser diodes, called self-terminated oxide polish (STOP). The steps of this process are simple and cheap; the laser diode fabricated by this technique has good performance. The frequency modulation bandwidth of STOP laser is 9.7GHz (–3dB bandwidth) at 50mA injection current, which is much higher than the double trench and single ridge lasers. We also measured the two-port network dynamic parameter S11 to realize the advantage of the STOP technique. The extrinsic parasitic elements RC of STOP laser are obvious lower than other processes. The time constant contributed from the RC elements might be the major limitation on –3dB bandwidth of ridge laser diodes. We believe that this technique reveals the potential for manufacturing applications in the future by optimizing the process parameters.

並列關鍵字

uncooled ； AlInGaAs ； fabrication ； quantum well ； high-speed ； laser diode

參考文獻

1.Pallab Bhattacharya, “Semiconductor Optoelectronic Devices”, Prentice-Hall, 1997.

2.Govind P. Agrawal and Hiloy K. Dutta, “Semiconductor Lasers”,

AT&T, 1993.

3.Kam Y. Lau, and A. Yariv, “Ultra-high speed semiconductor lasers”, IEEE J. Quantum Electron., vol. 21, pp. 121-138, 1985.

4.Paolo Montangero, Gjuseppe A. Azzini, Rosella Crovato, Luca Ricci, and Laura Serra, “Reliability tests and failure analysis for quality improvement in 1.5μm Fabry-Perot lasers”, IEEE J. Quantum Electron., vol. 37, 1996.

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高速免致冷砷化鋁銦鎵量子井雷射之研製

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