本文是針對一種雙模式壓電陶瓷馬達 (bimodal piezoelectric motor) 建立其動態數學模型及進行動態有限元素數值模擬分析,由所得到之軸向輸出位移與縱向輸出位移,來探討其輸出端之運動軌跡;另外,因壓電陶瓷馬達 (piezoelectric motor) 是由壓電陶瓷元件所組合成之致動裝置,其共振器 (resonator) 係利用壓電陶瓷產生於超音波範圍的振動來驅動之。故吾人亦在壓電陶瓷馬達本體與共振器上,作最佳化設計,同時架構實驗平台,經實驗實際量測所得數值來驗証最佳化之結果與動態數值模擬之準確性。 在理論與數值模擬方面,引用Hamilton’s Principle 及幾何拘束條件,有系統的推導動態系統的統御方程式,再利用有限元素法 (Finite Element Method) 的數值分析來模擬統御方程式;在最佳化設計方面,利用田口方法 (Taguchi Experimental Design Method) 來選定一個最佳參數組合,進而提升馬達輸出功之較高效率及降低製造成本。
This thesis presents the dynamic modeling by using Taguchi experimental design and Finite Element Modeling and simulation of a bimodal piezoelectric motor. The resonator is stimulated by piezoelectric ceramics to produce oscillations with frequencies in the ultrasonic region. The extended Hamilton’s principle is utilized for formulating dynamic equation of motion, and the Lagrange multiplier method is used to model the contact dynamics between the resonator beam tip and the rotor. The Taguchi experimental design method is applied to decrease the experimental effort and find the optimal design. Via the measure acceleration in the axial and longitudinal direction of the output head and experiment with a mechanism of linear stage by piezoelectric motor, the combined motion trajectory, displacement and force of the device are obtained, respectively. Practical experiment is also carried out to verify the analytic results.