菲佐顯微干涉儀研製與應用

A Design of Fizeau Type Micro-Interferometer and Its Application in 3D Profilometry

黃文孝(Wen-Shiao Huang)

指導教授 ： 章明

中原大學/工學院/機械工程研究所/碩士(2003年)

https://doi.org/10.6840/cycu200300482

摘要

本研究以菲佐(Fizeau)干涉技術配合顯微鏡系統的量測方式，針對光纖端面與LED晶粒表面進行其三維輪廓外形量測。本技術結合顯微鏡放大影像之功能及干涉技術的精密量測特性，再搭配PZT相移裝置及數位影像系統進行三維形貌定量量測，此量測系統可量測之影像範圍為0.76mm*0.57mm，水平解析度為1.1μm，高度解析度可達2.5nm。在實測中針對一核心直徑為9μm、被覆直徑為2mm之單模光纖端面之核心高度進行量測，重複量測25次，得到待測元件之平均球面曲率為170mm，量測標準差為8.13mm；平均高度為162.5nm，量測標準差為6.88nm。在晶粒表面量測中，因晶粒表面有塗覆銀膠處，而由銀膠處反射之光度太弱，無法有效判讀其間之干涉條紋，導致銀膠之輪廓量測結果不佳，整體而言，本研究的成果應可應用於微元件之表面輪廓量測，但表面反光雜訊干擾對量測結果影響甚鉅。

關鍵字

干涉技術 ； 顯微鏡

並列摘要

A Fizeau type interferometric microscope system has been developed for small scale surface profile measurement. Experiments were implemented with a fiber connector and a LED wafer. By using the PZT phase shifter and digital image system, the 3D profile data can be quantitatively obtained. The measuring range is 0.76mm*0.57mm, the horizontal resolution is 1.1μm, and the height measurement resolution is 2.5nm. For a single-mode fiber with 9μm diameter core and 2mm diameter ferrule, the average measured fiber height is 162.5nm with a standard deviation of 6.88nm and the average radius of curvature is 170mm with a standard deviation of 8.13mm. In the measurement of the wafer surface, there are silver pastes over the surface, and the reflect light from the silver pastes are too weak to let the fringe be read in effect, so the result is not good.
In conclusion, the developed system can be used in measuring the surface profile of micro component products , but the noise of the light reflected from the surface do effect the measurement.

並列關鍵字

interferometric ； microscope

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