摘要
雷射位移計在工業上經常被拿來做為品質檢測的工具，但目前的技術及市場都被國外公司，如Microtrak、Keyence、Hamamatsu、Panasonic等公司所占據且價格昂貴。此外市售位移計的種類有限，因此可供選擇的工作距離與量測範圍有限，無法滿足各產業別的需求。為了打破國外技術的壟斷，本研究建立雷射位移計的設計與組裝能力來解決業界的困境。 本文以三角測距的技術來建構雷射位移計系統，首先根據工業上的檢測需求定出系統規格，然後再對各相關的參數如角度、系統靈敏度、橫向放大率等參數進行優化，最後完成雷射位移計的架設與組裝。 本文所完成的工作為： 一、 針對量測系統的組成元件進行特性分析，找出影響量測精度的關鍵參數與關聯性。 二、 提出一套組裝系統的流程。 三、 以加權平方質心法來處理訊號，並用SIOS干涉儀來進行系統的校正與補償。
並列摘要
The laser displacement meter is used as quality inspection tool in the industry. However, concerning technologies and products all have been monopolized by well-known companies, such as Microtrak, Keyence, Hamamatsu, Panasonic. Certainly the price is also expensive. In consumer market, this type of displacement meters is limited. Therefore the optional working distance and measurement range are restricted. In order to overcome the monopolization, in this investigation the design and fabrication of a laser displacement meter have been established to meet the requirement of the domestic industrial. The laser displacement system has been constructed by the concept of a triangulation range finder. First of all, the specification is made according to industrial inspection qualification. Second, there are some parameters have been optimized including angle, sensitivity, lateral magnification. Finally, the displacement meter is constructed and verified. Some key points of the thesis can be summarized as follows: First, the measurement characteristics of the developed system have been analyzed. Main parameters and correlations influencing the measurement precision have been investigated. Second, a fabrication procedure has been proposed. Third, for the method of signal processing, a principle of weighting square of centroid has been presented. The calibration and compensation have been implemented by using the SISO interferometer.