散射式三角量測系統之研究

本文對直射式與斜射式這兩種三角量測系統進行研究，除了對光機架構、待測物傾斜及系統精度進行分析比較外，並採取掃描鏡的方式解決斜射式的問題。在系統中由線陣列CCD 對光斑信號進行取樣，透過光學元件的配置、後級信號處理與演算法，使檢測精度提升至亞像素的等級，讓測距的精度能符合商用規格。此外，基於待測物表面性質的考量，本系統採用定功率回饋的方法來提高系統的量測精度。最後將直射式三角探頭的架構與影像量測儀結合，完成一精度 2μm及量測範圍±5mm 的新型影像量測儀。

關鍵字

斜射式；三角量測；掃描鏡；影像量測儀

並列摘要

Two triangular measurement systems, normal incidence and oblique incidence, were investigated. Analysis and comparison were performed on structure of the optical system, tilting object, and system precision. In addition, the scanning mirror technique has been used as measurement method in oblique incidence system to reduce the deviation of measuring position. Linear array detector (LAD) was used in the system to sample the laser speckle signals. The measurement precision was improved to sub-pixel level and approached to commercial grade through the mounting techniques of optical elements, signal processing and algorithms. In addition, considering the property of the object’s surface to be measured, constant power feedback was used to improve the measuring precision. Finally, a structure of normal incidence triangulation method was coupled with the measuring microscope to complete a new CNC vision measuring system with the precision of 2μmin a measurement range of ±5mm.

並列關鍵字

Oblique incidence ； Triangulation ； Scanning mirror ； CNC vision measuring system

參考文獻

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散射式三角量測系統之研究

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