共振式掃描量測系統之研製

Resonant Scanning Measurement System

陳雲翔(Yun-xiang Chen)

指導教授 ： 徐力弘

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2011年)

https://doi.org/10.6827/NFU.2011.00138

摘要

雷射掃描量測儀(LSM:Laser Scanning Meter)是近代發展出來的一種精密的尺寸量測技術，由於此種技術具有:1.非接觸/非破壞性的檢測能力、2.準確度高、3.線上量測(on-line measurement)等特點，已廣泛應用於各相關產業的生產線上，其中最典型的應用為電線電纜的製程監控。由於傳統機械式的掃描鏡量測儀具有體積大和價格昂貴的缺點，因此本論文發展出一套共振掃描式量測系統。此一系統分成三個部分，分別為共振式掃描量測架構和影像擷取介面與處理系統，其中的共振掃描系統具有體積小，振動頻率高的優點，並可降低誤差及提高雷射的使用效率，再結合本文研發的影像擷取介面及訊號處理系統，可完成一套精確測量待測物的量測系統。

關鍵字

非接觸測量 ； 影像擷取系統 ； 共振式掃描量測

並列摘要

Laser Scanning Meter(LSM) is a precise size measurement technology developed recently, which has been widely applied to the online productions of various industries have the following characteristics: (1) non-contact/non-destructive detection capacity; (2) high precision; (3) on-line measurement. It is especially used in monitoring manufacture of cables. The traditional mechanic scanning instrument has the disadvantages of large size and high price, so this thesis develops a resonance scanning measurement system which is composed of three parts, namely, resonance scanning architecture, image capturing interface and signal processing system. The resonance scanning system has the advantages of small size, high operation frequency, and reduces the deviation and also improves the laser efficiency. Furthermore, it combines with the image and signal processing system developed in this thesis, thus we develop this measurement system that can promote accurate results to sub-micrometer.

並列關鍵字

non-contact measurement ； image capturing system ； resonance scanning measurement

參考文獻

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