- 學位論文
集束型設備之遠端監控/診斷系統的晶圓輸送實驗平台實作
Experimental Platform for Remote Monitoring and Diagnosing of Cluster-Tools Equipment
摘要
本文主要在建立設備端之一晶圓輸送實驗平台，用以模擬集束型半導體製程設備中的製程模組，最後將此實驗平台結合於三層式遠端監控/診斷系統，藉以驗證三層式監控/診斷系統的可行性與設備平台的實用性。 在實驗平台的建構上，本文以目前半導體業界常用的集束型設備為參考模型，逐步建構出集束型設備中主要模組特徵，配合機械手臂模擬晶圓輸送於各製程間的情形，而設備平台的訊號以可程式控制器(PLC)整合，將所得資料傳送給設備應用伺服器進行分析與監控。 在驗證的方面，本文發展設備端的人機介面，讓使用者透過電腦的圖形監控介面來控制實驗平台的作動，並且即時獲得設備的狀態如手臂位置、匣門關閉/開啓狀態、晶圓處理狀況與現場即時影像等。除此之外，本文亦利用三層式遠端監控/診斷系統的架構擴充監控範圍至網際網路(Internet)的監控，使用者亦可以透過客戶端的使用者介面來逹到同樣的監控目的。
並列摘要
The object of the article is to build an experimental workshop, which is used to simulate processing module of cluster-tools of semiconductor industry. In order to verify the reliability, this experimental workshop is finally combined to three-tiers remote monitor and diagnosing system. Under the construction of the workshop, the widely used cluster-tools equipments in semiconductor industrial are taken as reference to build most important features of the workshop. The workshop is equipped a SCRAR robot to simulate wafer transfer procedure during process modules. And finally, a programmable language controller (PLC) is used to collect all signals and states of equipments and feeds useful data back to server end. In order to verify the reliability of the workshop, a human-based interface is developed to make graphical control possible. Users could control equipments of the workshop directly and get status of workshop such as robot status, gate open/close, wafer conditions, etc. Instead of the traditional monitor and control, the architecture of three-tiers remote monitor and control system are used to expand the workshop to Internet scope. Users also could control the workshop through the Internet connection by the interface of client end of three-tiers Internet remoter and diagnosing system.