- 學位論文
集束型半導體製程設備之三層式遠端監控系統(伺服端)
Three-Tier Internet-Based Remote Monitor and Control System for Cluster Tools(Server End)
摘要
本文主要目的在提出一個三層式遠端監控系統中伺服端的架構，並依照所提出的架構來實作伺服端應用程式，以驗證系統的可行性，最後更結合客戶端與設備端使成為一個以網際網路為基礎的三層式遠端監控系統。 伺服端在三層式架構中扮演仲介客戶端與設備端的角色，除了負責把來自客戶端的資料處理並讓設備端運作外，亦需將設備端執行結果與狀態顯示給客戶端的使用者，在設計上必需兼顧到客戶端與設備端的通訊協定，所以在規劃上必需尤其仔細，方能使伺服端符合系統的要求。 監控系統往往需要整合各種通訊協定、資料格式與連線的方式，即使工業界已制定了許多的通訊標準，但這些標準間同樣存在著相容性的問題，所以如何去解決這個問題，己經變成設備整合主要的目的，很明顯的，除了針對設備的通訊協定撰寫介面程式外，目前還沒有全面性的解決方案。本文中的三層式監控系統中，設備端為一款以RS-232為通訊介面的機械手臂，同時伺服端程式又面臨網際網路TCP/IP協定與SQL Server資料庫的運作機制，為解決這個問題，本文將伺服端細分成Control Server Module、Web Server Module與Data Processing Module三個模組來分別處理這三種通訊協定，完成伺服端的建構。
並列摘要
The objective of this article is proposing an architecture server end of three-tier remote monitor and control system, and developing a software application of to verify the architecture of server end. Finally, the developed application will be introduced to connect the client end and equipment end of three-tier system. Server end played an agent between client end equipment end. Not only dealing with the requests from client end, but transferring the responses of equipments to client end. In order to meet the acquirements of client and equipment end, it needs to be designed carefully. Integrating the varieties of different communication protocols, data formats and types of connection is the most tedious and difficult part during the development of monitor and control system. Although many industrial standards had been established, there are incompatibilities to each other. Before finding out the general solution to integrate these standards, designing manipulation interface for each equipment is the possible way. The equipment end is composed of a SCRAR robot with RS-232 communication interface. The server end must integrating RS-232 interface, TCP/IP protocol and the mechanism of SQL Server database. This article divides the server end into three modules, Control Module, Web Server Module and Data Processing Module, to solve the problems in the system.