本論文係以溶膠-凝膠法、表面修飾電極技術進行固態式微酸鹼感測電極之研製,依研究結果發現,可知含五結晶水四氯化錫(SnCl4.5H2O)為前驅物備製之二氧化錫溶膠-凝膠薄膜披覆於片電阻約50~100 ohm/square之氧化銦錫基板上,經150℃低溫加熱後,可得較佳感測特性,於pH2~pH10之範圍內其感測度為50~55mV/pH;另外以市售網版印刷碳電極表面經濺鍍二氧化錫薄膜修飾後,亦具感測氫離子之特性,於pH2~pH12之範圍內感測度為50~55mV/pH。 由於電化學感測器不斷朝向微小化目標邁進,但參考電極卻無改進,阻礙其發展,故本論文嘗試以高分子材料製作微小化參考電極,並搭配酸鹼感測電極、離子選擇電極進行量測,同時與商品化參考電極相互比較,可成功得到一較佳高分子式微小參考電極之製程。 上述備製固態式酸鹼感測電極之方法具可大量製作、元件價格低廉等優點,結合微小化參考電極製程即可實現一微感測器之架構。
The sol-gel method and the electrode surface modification technology have been applied to fabricate a solid-state pH electrode in this thesis. According to the experimental results, tin (IV) chloride pentahydrate (SnCl4.5H2O) was employed as a precursor of the tin oxide sol-gel membrane coated onto ITO glass (sheet resistance: 50~100 ohm/square) and treated in 150℃ thermal oxidation to form a pH electrode. It exhibits a linear pH response of 50~55mV/pH between pH2 and pH10. Besides, the screen-printing carbon electrode with tin oxide on its surface has good sensitivity for detecting H+ ion. It’s sensitivity was 50~55mV/pH between pH2 and pH12. Owing to the ion selective electrode (ISE) and the biosensor was miniaturized but the reference electrode wasn’t improved, it would be restricted on the development for fabricating the miniature sensor. So in this thesis, the miniature reference electrode was fabricated by the polymer material which was combined with ISE to measure concentration of the specific substance in the liquids. The experimental result was also compared with the commercial reference electrode. This study successfully designed a good process for fabricating miniature reference electrode. As noted, the sol-gel method and the electrode surface modification technology have some advantages such as mass production and low cost, etc. If they are combined with the miniature reference electrode, the miniature sensor would be realized easily.