本論文探討 EFD 752V隔膜閥的計量原理及方法,針對隔膜之開度、供料儲存桶壓力之變化、旋轉塗佈量吐出之時間等三種條件來進行計量控制的實驗。以塗佈量計量之測量,研究計量控制三種條件之關係,據此研究可以建立標準的校準塗佈量方法,得以節省原料成本並減少停機調整時間。
This paper studied the measurements and operations of EFD752V diaphragm valve. The coating control with adjustment of the diaphragm, the pressure variation of supply tank and spin coating injection time are investigated and recorded for experiment. According to the relation expression between three coating control conditions, which can build the standard of coating control method, and save the cost of material and machine shut down to adjust time.