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  • 學位論文

旋轉塗佈與光碟保護層製作

Spin coating and manufacture of CD-R protective thin film layer

指導教授 : 余子隆
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摘要


旋轉塗佈製程技術被廣範的應用於電子工業,包括應用在積體電路、光碟、有機發光二極體與液晶顯示器的製作,皆使用旋轉塗怖技術來製作薄膜。 文中我們回顧CD-R(compact disc recrdable)的製作流程,其主要流程如下: (1)將光學級的聚碳酸脂利用射出成型法來製作基板; (2)利用旋轉塗佈的方法將染料均勻的塗佈於基板上; (3)將銀濺鍍於染料層上; (4)利用旋轉塗佈的方法將保護膠均勻的塗佈於銀層上; (5)最後印刷包裝即為成品 這報告中我們就旋轉塗佈之旋轉速度、旋轉時間、保護膠黏度對保護層最終膜厚的影響及保護層膜厚對碟片品質的影響加以討論, 其結果如下: (1)轉速愈高其離心力愈大,所得到的薄膜厚度隨著旋轉速度增加而使薄 膜厚度變薄,而在高轉速下其平整性愈佳。 (2)旋轉時間越長得到的薄膜厚度也越薄,而在長時間下,其平整性愈佳。 (3)黏度是溶液流動的阻力,高黏度須要高的剪力,所以保護膠黏度越大薄膜會越厚。 (4)最終膜厚(hf)與轉速(ω)的關係以冪次律表示如下: hf =Kω-b 在諸多文獻實驗所得到結果b值非常接近0.5,但我們所得到的b值接近1,這個結果最主要的差異在於溶劑的蒸發與非蒸發,在實驗中我們所使用保護膠為非蒸發型態,故b值接近1,這個結果非常接近Sukanek、Levinson等人的實驗。 (5)藉由對不同膜厚碟片品質的測試,我們得到合適的保護層製膜條件。

關鍵字

旋轉塗佈 保護層

並列摘要


Spin coating is a batch process in which a liquid film is spread by centrifugal force to form a thin film on a rotating disk. This technique is widely used in the electronics industry for integrated circuits, for optical storage disks, for liquid crystal display, organic light-emitting diode and optical devices etc. In this report we review manufacture process of compact disc recordable (CD-R) production system. The process consists of :(1) molding disk from polycarbonate resin, (2) dye coating to form a uniform thin recording film using spin coating,(3) sputtering a reflective Ag on disk; and (4) spin coating of protective film. In this report, we concentrate on the discussion protective film thickness dependence on the spin coating rotation speed, rotation time and solution viscosity. The results are as flows, 1.The centrifugal force on the polymer solution at given distance from the substrate is proportional to rotation speed ω2.If all other factors are equal, greater centrifugal force will result in a thinner film. 2.More spin time causes more solution to flow off part. A longer spin time will results in a thinner film. 3.The viscosity is an indicator of resistance of solution to flow. The higher viscosity, the higher shear stress need to cause a given of flow rate .A higher viscosity solution thus results in a thicker film. 4.The final thickness (hf) and spinning speed (ω) have a following power law, hf =Kω-b In literature most of the experimental results show the exponent b is close to 0.5,but our b is close to 1.The discrepancy between these two results could be due to different solvent were used one was volatile and the other was non- volatile. We used non- volatile lacquer ,so b was close 1. This result is close to experimental result of Sukanek and Levinson. 5. We tested the performance of disks with difference thickness. We found that there should be a suitable protective film thickness range that is good for CD-R application. By investigating the spin patterns with different spin coating process, we established a good coating process UV lacquer protective film.

參考文獻


68.LED有機電激發光元件的發光原理,工業材料160期,2000年4月
1.Acrivos,A.,Shah M., and Petersen, E.E.,1960, "On the flow of Non-Newtonian Liquid on a Rotating Disk, J.Appl﹒Phys. Vol.31,pp.963-968﹒
7.Bornside, D.E., Macosko, C.W., and Scriven, L.E., 1989,"Spin Coating-One Dimensional Model, J.Appl.Phys., Vol.66, pp.5185 -5193﹒
8.Bornside, D.E.,C.W. Macosko, and L.E. Scriven,l99l,"Spin coating of a PMMA/chlorobenzene solution",J﹒Electrochem. Soc., Vol.138, pp.371-377﹒
9.Biesenberger,J.A.,and D.H., Sebastian, 1983,"Principles of Polymerization Engineeing",lst ed.Wiley-Interscience﹒

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