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  • 學位論文

應用塗佈轉速與抽真空時間控制藍光光碟保護層的厚度及均勻性

The application of spin coating speed and vacuuming time to control the thickness and uniformity of cover layer for Blu-Ray disc

指導教授 : 林彥正
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摘要


本研究為探討藍光光碟片(Blu-Ray Disc) 保護層的製作。主要以薄 膜貼合(旋轉塗佈+薄膜)的方式製作,使用貼合膠黏滯係數在40~60 mPa.s範圍內。調整旋轉塗佈轉速變化及抽真空時間,以有效控制光碟保護層膜厚可在92~98μm之間,並使光碟片內、外圈保護層膜厚厚差符合規範達到±1μm以內。

關鍵字

旋轉塗佈 抽真空

並列摘要


This study concerns the cover layer process of Blu-Ray Disc by sheet bonding. The viscosity range of the bonding glues is from 40 mPa.s to 60 mPa.s. By carefully adjusting spin speed and vacuuming time, the thickness of cover layer can be effectively controlled over the range of 92~98μm. Moreover, the thickness variation is within < ±1μm which meets the requirement of specification

並列關鍵字

spin coating vacuuming

參考文獻


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[6] Meyerhofer, D.J., 1978, "Characterstics of Resist Films Produced by Spinning", J.Appl.Phys.,Vol.49,pp.3393-3397﹒
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