感光性溶膠-凝膠材料合成與應用研究

Synthesis and Application of Photosensitive Sol-gel materials

趙文華(Wen-Hua Chao)

指導教授 ： 陳玉惠

中原大學/理學院/化學研究所/碩士(2009年)

https://doi.org/10.6840/cycu200901124

摘要

中文摘要 目前製作微反應器主要材料分為以下幾大類，包含有矽、玻璃、高分子等等，其中以高分子材料來製作微通道反應器，主要應用於水性系統中，但常在有機溶劑系統中會造成通道溶解與相關副產物產生之缺點，因此為解決高分子型微反應器所面對之問題，必須透過使用矽或玻璃材質來製作其微通道，但利用此兩種材質在製作微通道時，必須使用氫氟酸來當作蝕刻液，嚴重影響了環境的安全，因此將利用感光型之有機-無機混成材料，來開發出不需經氫氟酸蝕刻製程之玻璃材質微通道反應器材料，以求更廣泛應用於未來之需求。 本論文是以四乙烷氧基矽烷和壓克力矽烷、環氧基矽烷為主要之原料，再經由溶膠-凝膠合成方法製備一系列的有機/無機SiO2混成溶膠，並討論添加不同結構之樹脂，來探討有機與無機材料之相容性。 主要之研究方向是以有機-無機之負型感光材料配製，將所合成出來之有機/無機SiO2混成溶膠中加入具有多壓克力官能基之反應性單體與光起始劑，均勻混合後，再經由黃光微影製程之曝光顯影方法，以應用於製作微流體反應器中之微型通道線路。其中也透過添加不同劑量之樹脂，來探討有機與無機材料之配比對微流體反應器之微型通道線路的之硬度影響。以上這些合成完畢的複合材料之結構以及特性可從紅外線光譜儀(FTIR spectra)以及熱重分析儀(TGA)得知。

關鍵字

溶膠-凝膠 ； 微流體反應器

並列摘要

Abstract
The main materials to manufacture the micro reactor chip have into several kinds, including the silicon chips, glass chips, polymers and so on. The manufacture chip of the micro channel reactor by the polymeric material, mainly applies to the water base system, Has the shortcome of the by-products and channel dissolution in the organic solvent system, In order to understand the problems to the polymeric micro reactor chip, it must use silicon or glass materials to maintain its micro channel, However，by using the hydrofluoric acid to treat as the etching fluid has affected the environment safety seriously. Therefore this stady will use the photosensitive organic - inorganic hybrid material to develop the new process to make glass type micro channel reactor without using hydrofluoric acid as etchant.It will be match the widespread demand in the future.
In this study, a series of phtotseneitive sol-gel materials were prepared from different materials, such as tetraethoxy silane (TEOS) 、3-methacryloxypropyl trimethoxy silane (Acrylatesilane)and trimethoxy (3-(oxiran-2-yl)propyl)silane (epoxy Silane). Fourier transform infrared (FT-IR) spectra were used to identify the functional group of the sol-gel material. The UV curable organic-inorganic material were formed by casting the formulated with fluorene based polymer、sol-gel material、photo-initiator (Irgacure 2959)、multifunctional acrylate monomer (EM261) and others additives onto a glass plate by radiation different time under 254nm UV lamp. Thermogravimetric analysis (TGA), showed that the thermal stability of the cured film increase with the radiation time.

並列關鍵字

Sol-gel ； Microreactor

參考文獻

1.M. S. Lee, N. J. Jo; J. Sol-Gel Sci. Technol., 24, 175-180 (2002)

Sol-Gel Sci. Technol., 26, 369-373 (2003)

3.J. D. Mackenzie, E. P. Bescher; J. Sol-Gel Sci. Technol., 19, 23-29 (2000)

4.D. K. Hwang, J. H. Moon, Y. G. Shul ,K. T. Jung, D. H. Kim, D. W. Lee; J.

Sol-Gel Sci. Technol., 26, 783-787 (2003)