雷射劃線非晶矽及銅銦鎵硒太陽能電池之研究

A Study of Laser Scribing for Amorphous Silicon and CIGS Thin Film Solar Cells

鄭仁維(Jen-Wei Cheng)

指導教授 ： 李有璋

中原大學/工學院/機械工程研究所/碩士(2010年)

https://doi.org/10.6840/cycu201000660

摘要

雷射技術已被普遍應用在太陽能電池的劃線製程，目前業界多使用摻釹釔鋁石榴石(Nd：YAG)雷射。Nd：YAG雷射多屬於奈秒級長脈衝寬度，因此加工過程中會對材料產生熱效應。本研究除了使用奈秒雷射，另外利用超短脈衝(10-15sec)之飛秒雷射進行薄膜太陽能電池的劃線製程，比較兩種雷射在薄膜上的劃線品質。實驗結果分別以光學顯微鏡、電子顯微鏡、原子力顯微鏡、膜厚測量儀等儀器量測加工後的表面品質。由於奈秒雷射屬於光熱加工，而飛秒雷射屬於光化學剝離加工機制，實驗結果顯示飛秒雷射在加工寬度，加工深度以及電性量測上都較奈秒雷射加工穩定，而且在加工邊緣不會有材料回熔造成火山口現象出現。

關鍵字

薄膜太陽能電池 ； 透明導電層 ； 飛秒雷射 ； 奈秒雷射

並列摘要

Nd:YAG laser is widely applied to the laser scribing of thin film solar cells. The pulsed width of Nd:YAG laser is normally nanosecond order, which will induce thermal effect during process. The study mainly focused on the scribing quality of the thin film solar cell by using nanosecond laser and ultra-short pulse (10-15sec) femtosecond laser. Optical microscope (OM), scanning electron microscope (SEM), atomic force microscope (AFM) and α-step were used to investigate the surface morphology after laser scribing. The photo-chemical mechanism of femtosecond laser process is different from the photo-thermal mechanism of nanosecond laser. The experimental results showed no matter the scribing width and depth or the electrical characteristic, the performance of the femtoseconf laser is better than that of nanosecond laser. Bumps appeared at the edge of scribing line from the remelting effect of the nanosecond laser process was not shown in the femtosecond laser process.

並列關鍵字

thin film solar cells ； femtosecond laser ； transparent conductive layer ； nanosecond laser

參考文獻

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