- 學位論文
微流道應用於氣相層析儀之定量分析
Quantitative Analysis of Gas Chromatography Using Microchannels
摘要
本研究探討在定量分析中，微流道應用於氣相層析儀取代傳統毛細管，原因是為了達到低成本、減少功率消耗、體積小，篩檢快速與各領域間的異質整合。對於利用半導體技術與微機電技術製作而成的微流道來說，如何取代具有傳統毛細管柱與充填管柱能將氣體層析分離的定量實驗為重要的探討目標。根據氣相層析相關文獻的探討定量分析原理、機制的研究。利用四種不同揮發性液體包括乙醇、丁酮、苯、甲苯做為毛細管及微流道比較之探討主軸，研究中亦配合實驗之設計完成寬度200μm、深度100μm之總長1m微流道管柱的製作並與毛細管柱做定量之比較。 藉由氣相層析實驗與數據的分析，其實驗結果顯示微流道在氣體定量分析上，具有一定的準確度。未來，期許此一成果有助於未來發展出體積小、檢測速度快的氣相層析系統。
並列摘要
In this study, the silicon-based micro-channel is studied in comparison with the traditional capillary for gas chromatography (GC) applications which require low cost, low power consumption, compact size and rapid detection. Based on the recent developed processing technologies in micro-electro-mechanical systems (MEMS), the micro-channels are successfully designed and fabricatedas capillary column. Four different volatile liquids include ethanol, methyl ethyl, ketone, benzene, toluene are used in this work to evaluate the micro-channels. The micro-channels having channel width of 200μm, depth of 100μm and length of 1m, are also compared with the capillary column for the quantitative analysis. In gas chromatography, the experimental results have demonstrated the micro-channels’ capability in quantitative analysis. This result will assure the potential development for a portable and fast detection gas chromatography system.