- 學位論文
微流道應用於氣相層析感測之研究
Study of Microchannels for Gas Chromatographic Sensing
摘要
微機電技術是近年來備受矚目的研究課題之一，為了達到低成本、省電的目的，與各領域間的異質整合也成為儀器開發的重點，在這次研究中即以體積小的微流道晶片做為氣相層析之管柱，對於利用半導體技術與微機電技術製作而成的微流道來說，如何使其具有傳統毛細管柱與充填管柱能將氣體層析分離的功能為重要的探討目標。根據氣相層析相關文獻的探討與感測原理、機制的研究，提出四種條件包括『微流道長度』、『烘箱溫度』、『分流使用』與『補償氣體使用』做為微流道應用之探討主軸，研究中亦配合實驗之設計完成微流道管柱的製作並與毛細管柱做比較。 藉由氣相層析實驗與數據的分析，其實驗結果顯示分流的使用及補償氣體的使用兩種因素確實具有提升微流道的氣體辨識度與氣體分離效果，烘箱溫度則不顯著，期許此一成果有助於未來發展出體積小、檢測速度快的氣相層析系統。
並列摘要
Microelectromechanical Systems technologies attract much research interest on communication and sensing technologies recently. For reduction of cost, size and power consumption, the heterogeneous integration has become the most important requirement of MEMS development. In this study, the micro-channel with small size was developed for the gas chromatographic column. The micro-channel chips were fabricated by using semiconductor technologies and MEMS technologies to replace packed columns and capillary columns. According to the mechanisms of gas chromatographic in related literatures, four key parameters including “micro-channel length”, “oven temperature”, “gas split”, “make-up gas” in the micro-channels are studied for the gas chromatographic applications. Micro-channel chips were fabricated and compared with capillary columns in gas chromatographic experiments. The experimental results show that the usage of split line, make-up gas and small width channel are effective to improve the gas distinguish ability and separation level, but the oven temperature is not the sensitive factor. The results are expected to enhance the development of small size and fast inspection gas chromatographic MEMS.