中文摘要 表面聲波感測器(Surface Acoustic Wave, SAW, sensor)已被相當廣泛的應用在氣體偵測領域之中。利用表面波傳遞於固體表面之原理,可透過SAW震盪器感測質量負載時中心頻率之飄移以達感測氣體之目的。而本論文將以表面聲波元件具有之靈敏度高、成本低及體積小等各項優點,搭配氣相層析化學分析系統,製備以表面聲波感測器為後端偵測器之氣相層析感測系統,首先透過「最佳化氣體流速實驗」、「單一氣體之定溫實驗」及「混合氣體之定溫實驗」,來建立定性資料庫。最後進行「調變升溫速率」搭配「混合氣體之程序升溫」之研究,探討表面聲波感測器應用於氣相層析系統之最佳化操作條件。 實驗結果顯示:藉由表面聲波氣相層析系統進行「升溫速率」與「程序升溫」之搭配最佳化操作實驗,可於短時間成功分辨出四種混合氣體,包括乙醚、甲苯、正丁醇、環己酮等氣體。「升溫速率」與「程序升溫」此兩種因素確實有效縮短氣體分離之時間,期許此一研究成果有助於未來發展出感測速度更快、體積更小之表面聲波氣相層析系統。
Abstract Surface Acoustic Wave (SAW) Sensor has been quite widely used in gas detection sphere. Based on the surface wave transmission on the solid surface, the sensing stimulus can be determined through the SAW oscillator frequency drift to achieve the purpose of vapor sensing. The surface acoustic wave devices were studied in this paper for high sensitivity, low cost, and compact size in gas chromatography system. Quantitative study includes the optimization of the gas flow rate experiment, single gas under constant temperature experiments and mixed gas under constant temperature experiments. Finally, the scheme of modulated heating rate, with mixed gas heating procedure is used to study the gas chromatography/SAW system and optimal operating conditions. The results show that four gas mixture the heating rate and temperature has been successfully distinguished by varying, including ether, toluene, butyl alcohol and cyclohexanone. "Heating rate" and "temperature-programmed" are two effective factors to speed the gas separation time. This work is important for the future development of a high speed and compact gas chromatography/SAW system.