表面聲波感測器應用於氣相層析感測之研究

Study of Acoustic Wave Sensors for Gas Chromatographic Sensing

莊嘉偉(Chia-Wei Chuang)

指導教授 ： 鄭湘原

中原大學/工學院/電子工程研究所/碩士(2009年)

https://doi.org/10.6840/cycu200901589

摘要

現今所使用的化學分析儀器往往體積龐大，昂貴、複雜、而且需要大量人力及時間來進行檢測工作，因此高靈敏度之微感測器開發將是未來檢測技術的一大挑戰。
表面聲波元件已被廣泛地應用在各工程領域中；而本論文將以表面聲波元件具有低成本、體積小及高靈敏度等優點，搭配氣相層析化學分析技術，進而建構以表面聲波感測器為後端偵測器之氣相層析感測系統，首先以層析因素即「載送氣體流速」及「管柱溫度」來決定最佳管柱層析效能之實驗條件，再以不同高分子薄膜厚度及沖提系統嘗試增進其系統感測效能。
在建立氣相層析系統方面，完成428MHz表面聲波元件振盪電路設計與製作，並整合Sueplco公司毛細管柱完成其系統。
　　實驗結果成功分辨出五種混合氣體，包括乙醚、甲醇、甲苯、乙苯、正丁醇等氣體，且藉由感測實驗與數據的分析，證明表面聲波感測器具有定性分析及穩定的定量分析能力。本研究成果對未來表面聲波元件感測應用提供了先期的開發與驗證，期許此一研究成果有助於未來發展出應用於氣相層析分析之微感測器。

關鍵字

高分子薄膜 ； 氣相層析 ； 表面聲波元件

並列摘要

Nowadays, most of the chemical analysis instruments are often huge, expensive, complicated. They require substantial human operations and a lot of time to carry out the measurement. Thus, the development of high sensitivity micro-sensors becomes a big challenge of future technologies.
　　The surface acoustic wave (SAW) devices have been widely applied in many engineering fields. In this thesis, the advantages of SAW devices, such as a low-cost, small size and high sensitivity, are shown. The integration of a gas chromatography column and SAW sensors as gas chromatography detectors has been demonstrated. The chromatography performance was investigated and optimized by tuning parameters including carrier gas flow rate and column temperatureas well as film thickness of polymer and gas make-up system.
　　The gas chromatography system was constructed using the sensors of 428MHz SAW oscillators which was also integrated with commercial Sueplcowax capillary columns.
　　The experimental results were successfully carried out to distinguish five different organic vapors, including ethyl ether, methyl alcohol, toluene, Ethyl benzene and n-butyl alcohol. Based on the sensing results, SAW sensors were proved to be effective in either qualitative or quantitative analysis. This research findings demonstrate the potential applications of SAW sensors for future micro gas chromatography analyzers.

並列關鍵字

gas chromatography ； SAW device ； polymer film

參考文獻

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