表面聲波感測器於氣相層析系統靈敏度之研究

氣體感測技術對於現今工業衛生安全、個人健康，以及環境監測等，具有重要的地位。表面聲波元件具備高偵測靈敏度、高穩定度、尺寸微小、反應迅速、製程簡單、成本低廉等優異特性，也因此表面聲波元件更得以在廣泛中的領域發揮其所長。本論文利用表面聲波元件來設計製作433MHz振盪電路，並用以實現表面聲波感測器，將其建構成一氣相層析系統，同時進行表面聲波元件靈敏度與偵測極限之研究，最後再將實驗結果與商用火焰離子偵測器做感測效能之比較。實驗的進行是以三種氣體以定量濃度進行研究，包括乙酸乙酯、乙醇及丁酮氣體，成功得出本論文自製之表面聲波感測器應用於氣相層析系統的準確度之標準差值為8%、靈敏度為330～450 (Hz/μmole)與偵測之極限值為0.75~0.91μmole。此外降低表面聲波元件溫度有助於提昇感測靈敏度與降低偵測之極限。

關鍵字

偵測極限；靈敏度；氣相層析；表面聲波元件

並列摘要

The modern gas sensing technology plays an important role in industrial safety, personal health and environmental monitoring. The SAW devices provide superior properties: in terms of sensitivity, stability, compact size, response time, processing simplicity and cost; therefore, these SAW devices are suitable for broad applications. Two-ports SAW devices are used and designed for 433MHz oscillators, these 433MHz oscillators are applied as SAW sensors in the gas chromatography system. The sensitivity performance of SAW devices are used in the GC system. The experimental result of SAW sensor's sensing performance is also compared with those of the commercial FID. Three gases including ethyl acetate, alcohol and butanone are used for quantitative concentration analysis. Based on the experimental results, the quantitative calibration curves have been obtained successfully. Their standard deviations of accuracy are within 8%, and their sensitivity ranges from 330 to 450 (Hz/μmole) while the limitation of detection is between 0.75 and 0.91 μmole. Moreover, the SAW devices show better sensitivity and sensing limitation under the lower temperature.

並列關鍵字

Detection limit ； SAW device ； Gas chromatography ； Sensitivity

參考文獻

[2-14] 彭康銘, “陣列式表面聲波感測器在有機氣體靈敏度之提昇,” 碩士論文, 中原大學電子工程學系, 2007.

[2-15] 莊嘉偉, “表面聲波感測器應用於氣相層析感測之研究”, 碩士論文, 中原大學電子工程學系, 2009.

[2-25] 鄭宇利, “表面聲波感測器應用於氣相層析儀之定量分析”, 碩士論文, 中原大學電子工程學系, 2010.

[2-28] 彭聖欽, “微流道與表面聲波感測器於微型氣相層析儀之整合與研究”, 碩士論文, 中原大學電子工程學系, 2011.

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國際替代計量

表面聲波感測器於氣相層析系統靈敏度之研究

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