現今表面聲波元件(SAW)已被廣泛地應用在各通訊系統領域中,作為頻率選取與雜訊抑制的濾波器件;此外,表面聲波元件具有體積小、穩定性佳、靈敏度高等特性,適合作為感測器件使用,藉由不同壓電基材的選用,可應用在不同的感測領域中。 本論文即以ST-切向之石英基材所製作之表面聲波元件為感測器件,透過振盪電路的設計以完成表面聲波感測器之製作;並搭配發展成熟之氣相層析(GC)技術以進行定量分析之研究。本論文針對三個子題包括「操作條件的確立」、「標準氣相層析儀(GC/FID)之定量實驗」、「GC/SAW之定量實驗」來進行研究。 實驗結果成功對五種氣體濃度進行驗證,包括乙醇、丙酮、丁酮、苯及甲苯氣體,證明了表面聲波感測器搭配氣相層析技術能具有穩定之定量檢測能力。
Surface acoustic wave (SAW) devices have been used as filters in modern communication systems. In addition, the advantages of SAW devices, such as small size, high stability and high sensitivity, make them suitable for sensor applications. By choosing different piezoelectric substrates, SAW devices can be applied in different fields of sensing. In this thesis, the SAW devices with ST-cut quartz were used as the vapor sensors. The SAW sensor was realized based on a feedback oscillation circuit for quantitative analysis in gas chromatography (GC). Three topics including “the optimization of the experimental condition”, “quantitative analysis of GC/FID” and “quantitative analysis of GC/SAW” are under investigation in this study. The experimental results successfully complete the quantitative calibration for five different organic vapors including ethyl alcohol, acetone, butanone, benzene and toluene. The GC/SAW system is verified for quantitative detection in organic vapors.