- 學位論文
微流道與表面聲波感測器於微型氣相層析儀之整合與研究
Integrate Microchannels and SAW Detectors for Micro Gas Chromatography
摘要
現今生活環境充斥眾多影響人類之化學氣體，故需要輕便簡易之化學檢測儀器替民眾健康把關，因此高靈敏度低成本之微型氣體感測器的開發勢在必行。由於微流道晶片與表面聲波元件皆具有體積小、機動性高以及製作成本低等特性，適合作為微型檢測元件使用，若能整合應用於化學分析檢測中，將極具實用的潛力。 本論文即以微流道結合表面聲波元件，搭配氣相層析分析技術，進而將其建構應用於氣相層析感測系統，根據氣相層析原理、以及表面聲波感測機制之研究，本論文提出以三種方式包括『微流道層析溫度』、『感測薄膜頻飄厚度』、『感測元件操作溫度』做為感測靈敏度之探討主軸，本研究中亦配合實驗目標而完成層析系統之建置，並與商用檢測儀器做定量分析效能的比較。 實驗結果以三種試樣氣體之檢量線進行驗證，包括乙醚、甲苯乙及正丁醇氣體，成功驗證自製之微流道整合表面聲波感測器的可行性，將其應用於氣相層析技術確實具有優異之定性、定量檢測能力；此外增加感測薄膜厚度、降低表面聲波元件溫度皆能提升其感測靈敏度，亦將有助益於微量氣體的檢測。
並列摘要
In today’s environment, there are many chemical species harmful to human beings who need simple and convenient chemical detectors to monitor our environment. Therefore, the highly sensitive and low cost gas vapor sensor development is highly demanded. Since micro channel chips, surface acoustic wave devices are small in size, robust in portability and as well as low cost, they are perfectly matched as a miniature gas detection devices and precision chemical analyzer. In this thesis, integration of the micro channel and SAW sensors is conducted for gas chromatography purposes. The sensor system is constructed based on the principle of gas chromatography as well as surface acoustic wave(SAW) sensing mechanism. Three key factors including “the micro channel temperature”, “sensor film thickness” and “SAW sensing temperature” are investigated for the improvement of sensitivity. All experimental results are obtained in a micro-channel/SAW gas complete chromatography system. Quantitative analysis is also performed to compare with commercially available instrumentations. The experimental results successfully demonstrate the quantitative analysis for three different organic vapors including ethyl ether, toluene and butyl alcohol. These results successfully prove the success of micro channel integrated with SAW sensors in gas chromatography feasibility with both qualitative and quantitative capabilities. In addition, the increase in the thickness of absorbing polymers are also positive to enhance the SAW sensitivity.