現今的壓電振盪器已被廣泛地應用在感測質量、溫度、壓力及其他領域中。而石英振盪器利用其表面聲波之機制也大量地運用在感測質量的微量變化。表面聲波元件其表面上所塗佈之聚合薄膜可作為化學感測器,並廣泛地運用在感測不同之有機氣體。 在本論文中我們利用雙埠表面聲波元件來製作皮爾斯型式的振盪器。其表面聲波元件之中心頻率及插入損耗分別為157.7MHz和-19.79dB。在製作完後的振盪器其輸出功率為16dBm@157.326MHz,而其相位雜訊為-62.6dBc/Hz@100KHz。 在本論文感測實驗中,在表面聲波振盪器上塗佈碳-氫和碳-氮有機薄膜來偵測有機蒸氣。而在實驗中所感測出之結果將在本文中作相關討論。
Piezoelectric resonators have been widely used as sensors for mass, temperature, stress and many other fields. Quartz resonators using surface acoustic wave (SAW) modes have been the most extensively used in mass sensing devices. SAW devices coated with polymer as chemical sensors become popular in the detection of a variety of organic gases. This thesis presents a Pierce-type oscillator using two-port SAW devices. The center frequency and the insertion loss of SAW device are 157.7MHz and –19.78dB respectively. The output power of oscillator using SAW device is 16dBm@157.326MHz while its phase noise is -62.6dBc/Hz@100KHz. SAW ocillators with organic films using C2H2 and C2H2/N2 to detect the serveral organic vapors. Results were obtained and discussed with SAW devices for the organic gas detection. The oscillator devices have been shown to be potential for an robust and handy gas detections.