- 學位論文
單埠式表面聲波氣體感測之研究
Characterization of Single Port Surface Acoustic Wave Gas Sensors
摘要
近年來表面聲波元件已廣泛應用於應用於感測器上。為了達到良好的偵測效果，感測元件被要求具有極高的靈敏度，因此元件的靈敏度也成為各種感測技術開發的重要指標，對於如何提升表面聲波感測元件感測靈敏度，乃是目前重要的探討目標。 本論文即以本身具有良好感測靈敏度的單埠表面聲波元件做為氣體感測之元件，根據表面聲波感測器相關文獻的探討與感測原理、機制的研究，進行單埠表面聲波振盪器的電路實作，本研究完成中心頻率為432MHz表面聲波元件振盪電路及相關電路的設計與製作。最後應用本研究完成的表面聲波感測器進行感測實驗與數據的分析。 實驗結果顯示單埠表面聲波元件確實具有良好的靈敏度與頻率漂移量提升效果，期許此一研究成果有助於未來發展出具有更高靈敏度及穩定性的表面聲波感測器。
並列摘要
Recently, the surface acoustic wave (SAW) device has plenty of applications on sensory area. In order to achieve better detection ability, the device is required to have high sensitivity. Therefore, the sensitivity device has become an important indicator of the sensing technology development. In other words, how to improve the sensitivity of SAW device, such as frequency shift at sensing, is an important research topic. We proposed a single port SAW oscillator which is a high sensitivity of sensing device. Based on related references and sensing mechanism of SAW sensor, we achieve a single-port SAW oscillation sensor. In this study, we designed a single port SAW oscillator circuit with a center frequency at 432MHz. Finally, we tested the single port SAW sensor for the sensing experiments where in the experimental data is then analyzed. The experimental result has been verified that our single port SAW sensor has better sensitivity and sensitive response. Our study is expected to help the development of the high SAW sensor in the future.