陣列式力感測器之設計製作

Design and Fabrication of Array Force Sensor

鄭凱鍵(Cheng-Kai Jain)

指導教授 ： 丁鏞

中原大學/工學院/機械工程研究所/碩士(2014年)

https://doi.org/10.6840/cycu201400295

摘要

摘 要
由於壓電聚合物材料具有具有高靈敏度、高精準性、以及柔軟性佳的特性，因此廣泛被應用於壓力感測器的設計上，其中又以聚偏二氟乙烯(PVDF)更被視為關注之焦點。本研究是針對PVDF壓電薄膜，探討其在相變化(phase transformation)上的效應。在拉伸製程中，增加PVDF的鏈長度，會導致PVDF的相變化，由α相轉變為β相。藉由掃描電子顯微鏡(Scanning Electron Microscope)觀察薄膜表面、薄膜鏈結構與XRD(X-Ray Diffraction)方法分別檢視PVDF薄膜之β相的內容與結構來決定壓電性能，實驗結果證實較80°C的拉伸溫度會得到較高比例的β相。而由實驗中得知，當溫度為80°C 且拉伸比為6時，可以獲得85.71％的β相、最大的壓電應力係數d33=34pC/N、極化電場為700kV/cm，可能是最佳拉伸條件。另以PVDF壓電薄膜製作壓力陣列感測器，經由實驗分析結果得知，陣列感測器中之每件PVDF壓電薄膜其量測力量的範圍為4.9N~29.52N，壓電薄膜輸出電壓可達780mV，並且具有一定的線性度與精準度。

關鍵字

關鍵字: 聚偏二氟乙烯(PVDF)、相變化、掃描電子顯微鏡、X光繞射分析儀、陣列式壓力感測器

並列摘要

Abstract
Piezoelectric polymers are increasingly considered as favorable materials for sensor applications due to its high sensitivity, high precision and flexible. One of the piezoelectric polymers, in particular, the polyvinylidene fluoride (PVDF) attracts more attention due to its good piezoelectric characteristic.
This study was devoted to the effect of phase transformation of the PVDF films. The phase transformation from α- to β-phase of the PVDF is resultant from increasing the PVDF chain length by stretching. The film chain structure was studied and characterized by X-ray Diffraction (XRD), and the film surface was observed by using Scanning Electron Microscopy (SEM). The XRD was carried out to determine the formation and content of β-phase in the drawn film. It was found that higher fraction of β-phase is obtained in the stretching process in the temperature between 70C ~ 90C. A maximum amount of 85.71% of β-phase content was measured and at 80°C by using the stretch ratio of 6. At this condition, a maximum stress piezoelectric coefficient d33 is gained about 34pC/N by using poling electric field of 700kV/cm. Using PVDF for array sensors is also investigated in this case study. Via analytical and experimental results, each piece of piezoelectric PVDF film can provide force measurement in the range of 4.9N~29.52N. The maximum output voltage is about 780mV. All PVDF films preserve acceptable linearity and accuracy.

並列關鍵字

Keywords: Polyvinylidene fluoride (PVDF) ； array sensor.

參考文獻

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