氧化鋅奈米柱成長於可撓性基板之複合壓電材料研究

Research of the composite piezoelectric materials of ZnO nanorods grown on the flexible substrate

彭賢越(Hsien-Yukh Peng)

指導教授 ： 許經夌

中原大學/理學院/物理研究所/碩士(2014年)

https://doi.org/10.6840/cycu201400493

摘要

摘要
本實驗以水熱法成長氧化鋅(ZnO)奈米柱結構於金作為電極的可撓式聚醯亞胺 (PI)基板上，並旋轉塗佈聚偏氟乙烯(PVDF)製成壓電複合材料進行量測，對其壓電性、壓電係數及電流密度進行分析並討論。
實驗中使用水熱法成長氧化鋅前於基板旋轉塗佈晶種層(seed layer)，可成長出具壓電性質的六角結構之氧化鋅奈米柱。而透過不同反應時間與濃度將會影響奈米柱之長寬。可以發現隨著時間增長，會使氧化鋅表面趨於混亂，其中以成長6小時形貌較佳。以此時間調整濃度變化，氧化鋅奈米柱結構將隨著濃度而提升，造成直徑、長度上的增加及結構更為有序。
實驗中以能量散射光譜儀（EDS）檢測確保氧化鋅奈米柱及軟性PI基板在晶種層的熱退火(Thermal annealing)下不會受到影響，並以原子力顯微鏡(AFM)和電子顯微鏡（SEM），確認奈米柱與PVDF的平均長寬、厚度及平整度。由不同濃度之參數可得到樣品壓電係數落在2.23~9.73 µm/V之間，相較於氧化鋅之塊材及微米尺度之晶體可看出隨尺度縮小壓電係數有變大之趨勢，並可得知實驗中元件的壓電電壓及電流密度會隨著濃度上升而增加，功率也會隨之提升。最後論文中透過調控成長濃度探討氧化鋅奈米柱結構、壓電電壓及電流密度的變化，並討論可能造成不同濃度元件壓電係數改變之原因。

關鍵字

複合壓電材料 ； 氧化鋅奈米柱 ； 可撓性

並列摘要

Abstract
In this experiment, zinc oxide (ZnO) nanorods were grown on the flexible polyimide (PI) substrate with the hydrothermal method. Then poly(vinylidene fluoride) (PVDF) was spin-coated on the substrate to make it as a stable Piezoelectric composite sample. We analyzed its electrical and piezoelectric properties and discussed the influence from ZnO nanorods.
Existence of the ZnO seed layer spin-coated on the sample induced the ZnO nanorods growth. Different reaction times and concentrations of the precursors affected the diameter and the length of the nanorods grown by the hydrothermal method. The size and orientation of ZnO nanorods tended to be distributed randomly with reaction time increasing. The structure grown with six hours showed preferred result. The concentration of the precursors also affected the diameter and the length of the ZnO nanorods.
Energy Diffraction Spectroscopy (EDS) confirms that the composition of ZnO nanorods and PI substrate keep no change after annealing. The length and diameter of the layer thickness of PVDF were determined by Atomic Force Microscope (AFM) and Scanning Electron Microscope (SEM). The piezoelectric coefficient obtained in this experiment is between 2.23 and 9.73 µm/V. Compared with ZnO bulk material, the result shows that the piezoelectric coefficient increases with the material size decreasing. Finally, we discuss the relations among the structure of ZnO nanorods, the piezoelectric voltage and current density of the sample, and the precursor concentrations in ZnO growth.

並列關鍵字

ZnO nanorods ； flexible ； composite piezoelectric materials

參考文獻

24 韓瑋軒，"鋯鈦酸鉛/聚偏氟乙烯/銀壓電奈米複合材料之介電和壓電性質研究"，中原大學物理系，碩士論文(2010)

25 徐誌鴻，"利用接觸式原子力顯微鏡探討氧化鋅奈米柱之壓電特性"，中原大學物理系，碩士論文(2013)

30 方建智，"以溶膠凝膠法製備鋁摻雜氧化鋅薄膜之研究"，中原大學物理系，碩士論文(2012)

2 Wang, Z. L. Scientific American. 2008, 298 , 82-87.

3 Xu, S.; Hansen, B. J.; Wang, Z. L. Nature Communications. 2010, 1 , 93.