精密微動平台定位控制系統分析與研究

Research and Analysis of Precise Micro Platform Positioning Control System

陳慶恩(Ching-En Chen)

指導教授 ： 范憶華

中原大學/工學院/機械工程研究所/博士(2015年)

https://doi.org/10.6840/cycu201500216

摘要

本研究之重點是提出一種智能型運動控制系統，應用於縮放儀式機構的奈米級微動平台上。該平台設計主要目的為了滿足越來越微小的工業產品製造，同時實現加工高精確度和提高處理效率。精密微動平台係透過縮放儀機構與小型XY線性滑軌所組成，並利用一個傳統的XY單軸致動器所組成的平台作為驅動端。本研究的目標是提高精密微動平台在5mm×5mm的區域移動的定位精度，且重複定位精度誤差小於800nm。由於不同的PID參數會影響平台的定位精度以及雙軸的系統響應，因此提出了基因演算法求解的最佳PID參數。透過模擬和實驗結果顯示，此奈米級精密微動平台的智能運動控制系統開發是可行的。

關鍵字

微動平台 ； 精密定位控制系統 ； 基因演算法

並列摘要

This study focused on the development of an intelligent motion control system for a nano-scale micro-platform based on the pantograph mechanism. The platform is designed to satisfy the need for achieving high accuracy and process efficiency in the manufacture of increasingly small industrial products. The target platform is mounted on a pantograph and small X-Y sliders, and is driven by a traditional X-Y platform with common precision. The goal of this study is to drive the target platform to move in the region of 5mm × 5mm for the positioning, and repeatedly positioning accuracy error is less than 800 nm by a traditional X-Y platform. Due to the different PID parameters will affect platform positioning accuracy and system response for the two axes, the optimal PID parameters by the Genetic algorithms was proposed. The simulation and experimental results indicated that the proposed method is feasible for development of an intelligent motion control system for the nano-scale micro-platform positioning.

並列關鍵字

Micro-Platform ； Genetic Algorithm ； Precision Positioning Control System

參考文獻

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