- 學位論文
高抗反射率藍寶石視窗之製備與模擬
Fabrication and simulation of high anti-reflective sapphire window
摘要
藍寶石材料具有廣波長的穿透性質且有高機械強度與化學惰性，因此可用於特殊用途的視窗與鏡片。為了提升穿透率，先前技術常在藍寶石基板表面製作抗反射薄膜，本研究則提出於藍寶石基板製作週期性微/奈米結構，使得基板更具有較寬波段的抗反射效果與光入射角度範圍較廣，而且有良好的疏水性。本論文先以嚴格耦合波分析方法模擬週期性結構的高度越高、結構寬度越小且結構無間距的抗反射效果越佳。其次，利用滾輪式壓印技術將週期性結構壓印至藍寶石基板表面，以做為蝕刻擋層，並配合感應式耦合電漿蝕刻系統製作出線寬/間距/高度為1.9 μm/0.6 μm/1.1 μm之週期性圓錐結構。在量測波長範圍在300 nm~1200 nm的平均反射率只有0.66%，模擬結果證明與實驗有相似的結果。
並列摘要
Sapphire is a material with high light transmittance at broadband wavelength, high mechanical strength and high chemical stability. To further improve the transmittance, prior studies coated anti-reflective thin films on the sapphire substrate. This study introduced micro/nano structures on the sapphire substrate to enhance the anti-reflection performance with wide-angle of light incident at broadband wavelength and also increase the surface hydrophobicity. At first, rigorous coupled wave analysis (RCWA) was used to simulate the size of the structures on the anti-reflection performance. The result showed higher and narrower structure with no structure space has better anti-reflection performance. Secondly, periodical polymer structures were fabricated on the sapphire substrate by roller imprinting technique as a etching mask. The inductively coupled plasma etcher was introduced to fabricate 1.9 μm wide, 0.6 μm space and 1.1 μm high conical structures on sapphire. The average reflectance is 0.66% at wavelength 300 nm~1200 nm. The simulations showed the similar result compared to the experiment.