具表面電漿效應之抗反射藍寶石視窗模擬與製作

Fabrication and simulation of anti-reflective and surface-plasmonic structures on sapphire window

張翔傑(Xiang-Jie Chang)

指導教授 ： 李有璋

中原大學/工學院/機械工程研究所/碩士(2014年)

https://doi.org/10.6840/cycu201400901

摘要

藍寶石材料具有寬波段的高穿透率性質且具備耐高溫與化學穩定性，常做為特殊用途的視窗與鏡片。但藍寶石基板在可見光波段之反射率高於玻璃基板，因此為了降低反射率，通前會在藍寶石表面製作抗反射膜。本論文提出以次波長結構搭配表面電漿共振效應，目的是希望能夠進一步降低表面反射率。
本研究首先以有限時域差分法模擬不同間距、高度、線寬的結構的抗反射效果，接著再搭配不同鋁薄膜厚度，研究表面電漿效應對反射率之影響。最後並實際以奈米壓印微影搭配電感耦合蝕刻製程製作出線寬/間距/高度為780 nm/120 nm/250 nm抗反射藍寶石視窗。在量測波長範圍在400 nm~1400 nm的平均反射率只有1.50%，模擬結果證明與實驗有接近的結果。

關鍵字

抗反射 ； 表面電漿子 ； 奈米壓印微影 ； 有限時域差分法 ； 次波長結構

並列摘要

Sapphire material is made as a special window or lens for its high transmission at broadband spectrum, high temperature resistant and high chemical stability.　Compared to glass, sapphire has higher reflectivity at visible spectrum. To reduce the reflectivity, conventional anti-reflective thin films were often coated on sapphire. This study integrated sub-wavelength structures with surface plasmon resonance to reduce the surface reflectivity of sapphire window.
Finite difference time domain (FDTD) method was used to simulate the reflectivity of sub-wavelength structures with various spacing, height and width. FDTD was also further used to simulate the influence of surface plasmon resonance on the reflectivity with different aluminum film thickness on sub-wavelength structures. This study employed roller imprint lithography and dry etching to fabricate 780 nm wide, 120 nm spaceing and 250 nm high cone-shaped structures on sapphire windows. The average reflectance was only 1.50% across a spectral range of 400–1400 nm. The calculated reflectance is approximately close to the measurement result.

並列關鍵字

Antireflection ； FDTD method ； Subwavelength structures ； Nanoimprint lithography ； Surface plasmonic

參考文獻

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