433MHz表面聲波感測矩陣用於揮發性有機物特性分析

Characteristic of 433MHz Surface Acoustic Wave Array for Organic Vapor Recognition

管懿麟(Yi-Lin Guan)

指導教授 ： 鄭湘原

中原大學/電機資訊學院/電子工程研究所/碩士(2018年)

https://doi.org/10.6840/cycu201800054

摘要

表聲波(Surface acoustic wave, SAW)技術因其製程技術成熟、成本低廉(需要光罩數低)已廣泛應用於訊號處理，通訊領域多年。同時由於表面聲波感測器具備高靈敏性、元件體積小容易微縮等特點。故已廣泛應用於感測氣體，液體，溫濕度，氣壓等的不同應用。同時以MEMs感測器之形式活躍於各個移動及IOT設備中。
本論文基於人類嗅覺系統仿生學原理,於4顆陣列式SAW元件分別噴塗4種聚合物薄膜，以增強各SAW元件的選擇性吸附能力。並建立一表面聲波矩陣感測，並利用混頻、放大及除頻，構建一完整可用於氣體特徵截取之感測平臺。並就表面聲波感測器感測原理就感測氣體進行特性分析。
表面聲波舉證利用四種高分子薄膜EC(Ethylene Cellulose),PVC (Polyvinylchloride),PVP(Polyvinylpyrrolidone),PMMA(Polymethylmethacrylate) 偵測氣體包括:苯、丁酮、甲醇和乙醇4種揮發性有機物，並對四種有機探討不同薄膜對不同氣體的吸附差異性，就用各薄膜對4種氣體感測頻飄大小進行標準化，建立一揮發性有機物特徵資料雷達圖。

關鍵字

表面聲波振盪器 ； 高分子薄膜

並列摘要

Surface acoustic wave (SAW) technology has been widely used in signal processing and communications for many years due to its mature manufacturing technology and low cost (requiring a low number of photomasks). As the same time for the surface acoustic wave sensor with high sensitivity, small components, easy to shrink and so on. It has been widely used in sensing gas, liquid, temperature and humidity, pressure and other different applications. Now surface acoustic wave sensors are active in various mobile and IOT devices as MEMs sensors.
This paper is based on the principle of human olfactory system bionics, four kinds of polymer films were sprayed on four array of SAW devices to enhance the selective adsorption capacity of each SAW device, and establish a surface acoustic wave array sensing system. A sensing platform for gas feature interception built by frequency mixer, amplifier and frequency division. Based on the sensing principle of the surface acoustic wave sensor, characteristics are analyzed in accordance with the sensed gas.
SAW array uses four kinds of macromolecule films EC(Ethylene Cellulose), PVC(Polyvinylchloride), PVP(Polyvinylpyrrolidone) and PMMA(Polymethylmethacrylate) to detect gas, including four kinds of volatile organic compounds, such as benzene, butanone, methanol and ethanol. In order to investigate the differences in the adsorption of different gases on different membranes, the four kinds of gas sensors were used to standardize the frequency drift of each gas, and create a radar map of the characterization of volatile organic compounds.

並列關鍵字

SAW ； High-Poly film

參考文獻

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