- 學位論文
利用MSA分析晶圓半導體代工廠的量測系統-以P公司為例
The Analysis of Measurement System for Semiconductor Foundry by Using MSA-A Case Study of P Company
摘要
摘要 現階段的半導體製程由於十分精密且朝微小化的發展趨勢，使得半導體的製造上面臨到相當大的挑戰，所以如何確保在繁瑣的製程前後關係中加入最佳化的品質系統來呼應前後的因果關係就變成是一項十分重要的課題，同時為了要讓所設定的量測系統最佳化我們可以運用TS16949中的核心工具來建構半導體廠內的品質系統，在這些核心工具中我們可以運用量測系統分析(Measurement System Analysis,MSA)手法來建構我們的量測系統，依據MSA技術手冊要求，針對量測系統的建構與管理應分析出造成變異的來源，同時消弭這些變異，讓量測系統可以提供最佳的量測品質協助製程作業可以順利的進行。本研究將透過個案的研究及證明，來建立以TS16949為基礎同時整合核心工具建立一套適合業界使用的量測系統模式。 在案例分析過程中為有效建構適合半導體廠所使用的量測系統，運用量測系統管理模式來作為個案公司驗證的基礎，該量測系統管理模式可分成3個部分，分別為輸入階段、分析過程階段及輸出階段，在驗證過程中運用線性(Linearity)及量具重複性與再現性(Gage Repeatability & Reproducibility)等方法來驗證量測機台的量測能力與品質，同時將驗證的結果加以持續改善及維持，協助量測系統管理模式可以在半導體廠中被有效運用，協助半導體廠製造的產品可以被有效監控與判定，藉以降低相關成本增加產能需求。
並列摘要
Abstract Since the semiconductor industry has entered an era of nanometer, specifications of related process are required to be exactly accurate. In order to move overall technology of semiconductor process to the next generation to reduce the cost and increase the yield, it is quite crucial for semiconductor industry to apply system of measurement effectively. For maximizing the quality of measurement system, this research applies one of the core tools of TS16949, MSA (Measurement System Analysis), to build up the quality assurance system in our object plant. Based on the requirement of the MSA manual, we should find out the quality variations through the construction and management of the measurement system. By eliminating the variations, measurement system can optimize its quality and make the manufacturing process even more fluently. In this case study, we hope to build a model measurement system which is best suitable for the semiconductor industry through the foundation of TS16949 and the combination of the core techniques. In order to get an ideal result, this study is based on the Measurement System Analysis (MSA). There are three parts of our research: input stage, analysis stage, and output stage. Methods, such as Linearity and Gage Repeatability & Reproducibility, are adapted to verify measurement tool capability and quality. Also, with followed adjustment and practice, we can figure out an effective measurement model for semiconductor industry. Through its effective monitor and judgment, industry can lower its cost and increase its productivity.