TFT-LCD蝕刻液濃度計之設計原理探討

顯示器產業是繼半導體產業之後，全球重要的產業之一。而液晶顯示器應用市場一般預料將不斷擴大，逐漸取代傳統螢幕，成為市場主流。但是平面顯示器產業是一場不折不扣的資本競賽，需要龐大的投資金額，有著極高的進入與退出障礙。投入該行業從「進入」到「投資」到「降低成本」到「再投資」等於是一條不歸路。而且當玻璃尺寸越做越大，其如何降低生產成本，便是主要的課題。在面板生產過程中，蝕刻是一個非常重要的步驟，完全可決定產品的良否，而在此步驟中，蝕刻液是關鍵性的因素，如何調配，如何使其發揮最大效用均是重要課題，而濃度計可藉著導電度或超音波來顯示蝕刻液的狀態，藉之可掌握蝕刻過程的整個情況，是蝕刻中不可缺少的工具，故本報告以蝕刻液的濃度計為主題，內容包含蝕刻製程的介紹，導電度式及超音波式濃度計介紹及其設計原理等。

關鍵字

超音波；濃度；平面顯示器；蝕刻液；蝕刻製程；導電度

並列摘要

Following the semiconductor industry, the monitor industry has become one of the most important industties. TFT displays have replaced the CRT (Cathode Ray Tube) displays and become mainstream.But it needs a large investment to develop the TFT industry.When the size of glass becomes larger,how to make cost down is getting more important. In the processes of display manufacture ,etching is a very important step. For successful etching, the monitoring of concentration of etching liquid is the key factor.Therefore, the concentration meter plays a main role in the display manufacture.There are two types of concentration meters, one depends on the conductivity of liquid, another depends on the speed of supersonic wave in the liquid. This report will introduce etching process,principles of the concentration measuring, and measuring tools.

並列關鍵字

Etching liquid ； TFT display ； Concentration ； Etching process

參考文獻

[6].GLI，OPERATING MANUAL Model E33 Electrodeless Conductivity

[14].S. Grimnes and O.G. Martinsen, Bioimpedance and Bioelectricity Basics,

Academic Press, ISBN:0123032601, 1981.。

applications ,John Wiley & Sons,Inc.,pp1-119,1980。

[17].K.J.Vetter, Electrochemical Kinetics-Theoretical and Experimental

國際替代計量

TFT-LCD蝕刻液濃度計之設計原理探討

全文下載

主題瀏覽