摘要
本文主要研究目標為設計一具短直樑行進波傳動之壓電馬達並裝置於線性滑軌，整合完成一具線性馬達載台系統。設計之重點著重於在有限長之短直樑上如何形成有效之行進波振型，並設計適當之載台系統與短直樑行波壓電馬達結合。短直樑行進波線性壓電馬達結構主要包括排成一列兩組之壓電振動子，一列兩組之多片壓電振動子是以間隔1/4波長設置之組成，並以一體成形極化製成，經施加雙共振電源(sinωt、cosωt)驅動壓電元件產生時間相差π/4同振幅雙駐波，而有效在樑上合成連續行進波。短直樑兩端之結構是以變幅原理設計，利用大截面之端面設計可有效減少波反射以確保行進波之形成。依目前製作之短直樑行進波壓電馬達，其解析度可達次微米級，驅動頻率43.7kHz下施加±150V之驅動電壓推動摩擦係數約為0.1之載台，可獲得靜態拉力為200g、線性速度45mm/sec、解析度0.25μm。
並列摘要
The main purpose of the thesis is to design a piezoelectric motor constructed on a short straight beam and employed on a linear guideway. How to find an effective traveling-wave mode on a finite-length short straight beam and form a piezoelectric traveling-wave motor which is integrated with a suitable guideway is the primary design target. A series of piezoelectric actuators aligned in line associated with a short beam The short-beam traveling wave motor is constructed with two sets of piezoelectric ceramic actuators separated with 1/4 wavelength in a line. The piezoelectric ceramic actuators are fabricated in whole body, which is driven by dual circuitry with same amplitude but different phase of π/4. The generated two standing waves will merge and form a travelling wave. At the end of the short beam, larger cross-section area is designed so that wave reflection is reduced and preserve effective travelling wave. The current developed short-beam piezoelectric linear motor is able to produce ideal output speed of 130mm/sec and resolution better than the target of 100nm while applying voltage of ±150V@43.7kHz. To implement and drive a general stage with friction coefficient about 0.1, the propulsion static and dynamic force are measured about 200g and the out speed is about 45mm/sec.