本研究利用行進波發展新型線性壓電馬達,此線性馬達由定子與轉子兩部份所構成。本文主要重點為探討曲線機構與黏貼於曲線機構之齒對於定子之影響關係。當給予曲線機構相鄰的雙晶片型壓電致動器不同相位之交流電時,此曲線機構將產生行進波,再藉由裝置於定子上之齒來推動轉子形成線性馬達。本研究包括曲線機構及接觸層與轉子之數學模型推導及利用ANSYS進行模擬分析,探討各種重要設計參數之影響並與實驗比較。最後測試驗證馬達之速度與承載力輸出效果,分析與驗證皆說明承載力大為此線性壓電馬達之優點。
A new type of piezoelectric linear motor by means of traveling wave is developed. The linear motor comprises of the stator and the carriage. The stator fundamentally consists of a meander-line structure and a gear teeth mounted on the meander-line structure is focused in this study. The meander-line structure with bimorph actuators laid in a line driven by two sets of AC power with phase difference can generate traveling wave. The traveling wave is transferred to the carriage by the gear teeth, and thus forms a linear motor. Modeling of the meander-line structure and the contact layer and the carriage is derived. Simulation by ANSYS and practical experiment are carried out to examine the function for several different key parameters and verify their approximation. Practical experiment is also carried out to show the performance of output speed and load bearing. Large load bearing is an advantage of the developed piezoelectric linear motor.