精密定位平台之放大機構設計

Design of A Manified Stucture for Precision Position Stage

李宜達(Yi-da Lee)

指導教授 ： 丁鏞

中原大學/工學院/機械工程學系/碩士(2007年)

https://doi.org/10.6840/CYCU.2007.00642

摘要

隨著半導體進入奈米製程，相關業界對於高精度、高性能的設備需求持續增加，無論是在製程生產或量測儀器方面，精密定位技術都扮演著不可或缺的角色。目前一般機械結構製成的多軸定位平台，其實用性常受馬達尺寸大小限制，因此本文藉由放大機構之設計，使撓性絞鏈(Flexure Hinge)結構受力後彈性變形，加大行程至公釐，並以壓電致動器作為驅動器推動定位平台，兼具長行程與高精度之定位平台。
本文採用有限元素法軟體分析撓性絞鏈平台放大機構，平台之設計有槓桿式及肘節式放大機構亦經有限元素分析。並以模擬結果決定各細部設計參數，達到公釐級行程，以及整體之體積最小，並同時考慮加工可行性等要求之最佳設計。

關鍵字

撓性絞鏈 ； 放大機構

並列摘要

When semiconductor process into nano-scale, In manufacture or measure device, related industries increase the requirement to high precision high performance equipment. Precision Positioning is the key point technology for the device. In general, most positioning stage made by multi-axis mechanism, and the practicability is easily restricted by motor size. In this paper, design the amplification mechanism for millimeter stroke, the structure using flexure hinge to in the elastic region. Using piezoelectric actuator driven positioning stage, The task has been fulfilled to Precision and stroke.
In this paper, Design and analysis of a displacement amplified positioning Stage using finite element method. There are lever and toggle’s displacement amplified method in positioning stage, using finite element method to determine detail parameter for the millimeter distance also for smallest size. And consider the manufacturing possibility.

並列關鍵字

amplification mechanism ； flexure hinge

參考文獻

[3] F. Meli and R. Thalmann, Long range AFM profiler used for accurate pitch measurements, Meas. Sci. Technol. 9 (7), pp. 1087–1092, 1998.

[4] Ryu, J. W., Lee, S. Q., Gweon, D.-G., and Moon, K. S., "Inverse Kinematic Modeling of a Coupled Flexure Hinge Mechanism," Mechatronics, 9, pp. 657–674, 1999.

[5] P. Gao, S.M. Swei and Z.J. Yuan, “A new piezodriven precision micro-positioning stage utilizing flexure hinges.” Nanotechnology 10, pp. 394–398, 1999.

[9] T.-F. Lu, D. C. Handley, Y. K. Yong, C. Eales, "A three-DOF compliant micromotion stage with flexure hinges," An International Journal of Industrial Robot, vol. 31, No. 4, pp. 355-361, 2004.

[10] BChoi S ,Han S S,Lee Y S. ”Fine motion control of a moving stage using a piezoactuator associated with a displacement amplifier.” Institute of Physics Publishing, 14:222-230,2005,.