台灣高科技廠節能技術之分析

摘要高科技廠之能源使用量盛大，一棟12吋晶圓廠契約容量約為60~120 MW、一棟8.5代面板廠契約容量約為100~ 150MW，相當於一個小城鎮的用電量，廠務設施、製程機台各佔了55%、45%的用電；概分為四個部分進行探討。一、廠務系統與節能技術說明，對空調、電力、空壓等節能技術原理與能源效率予以探討，包含空調之空氣側、水側節能措施；電力的功率因數補償、減少線損，照明效率提昇；空壓的降低入口溫度，多機連鎖控制等進行分析。二、既設廠房之節能現況，包含汰換效率較差的空調、照明設備，UPS經濟運轉模式，空調水側運轉最佳化改善採ESCO方式導入及節能績效檢測之分析，製程設備機台開機率與產能利用率搭配的運轉最佳化進行探討。並以近年執行案例予以說明。三、新建綠色廠房之節能規劃，美國LEED與台灣EEWH綠建築評估系統兩個之差異及如何規劃與導入，包含建築外殼、空調系統、照明系統之節能，廠務最佳供應模式及高效率之節能設備之選用，使用綠色能源及低能耗之設備。並以台灣近三年獲獎之經典案例進行說明。四、節能績優廠商之執行案例進行節能技術收集、分類，彙整其執行改善措施後，予以歸納、探討，並找出特殊作法及未來科技廠之節能執行方向，以達成企業永續發展的長遠目標。

關鍵字

廠務系統運轉最佳化；綠色科技廠房

並列摘要

Abstract High-tech Fab energy use grand, a 12-inch Foundry Fab contract capacity of about 60 ~ 120 MW, a 8.5-generation TFT Fab contract capacity is about 100 ~ 150MW, equivalent to a small town with electricity, Fab facility, each machine processes 55%, 45% of the electricity; shall be divided into four parts to explore. 1 Facility system and Energy conservation, and air conditioning, electricity, compressed air and other energy saving technologies and energy efficiency principles to be explored, including air conditioning of the air side, water side energy conservation measures; electricity power factor compensation, reducing line losses, the efficiency of lighting upgrade; Air inlet temperature reduction, multi-machine control chain analysis. 2 Both set up Fab's energy status, including the replacement of less efficient air-conditioning, lighting equipment, UPS economic operation mode, air conditioning, water side of the operation optimization ESCO importing and energy-saving performance testing energy saving improvement analysis, process equipment, machine operation rate and capacity operation with optimal efficiency to explore. And to perform the case in recent years are described. 3 The new Fab's green energy plan, and the U.S. LEED & Taiwan EEWH Green Building Rating System and how the differences between two planning and import, including the building shell, air conditioning system, lighting system energy saving, Facility and the best mode of supply, high efficiency energy saving equipment selection, use of green energy and low energy consumption equipment. And Taiwan in recent years with award winning classic case of a description. 4 The blue chip companies implement energy saving case for energy conservation technology to collect, classify, archive their implementation of improved energy efficiency measures, to summarize, discuss, and identify special practices and technologies of the future plant's energy executive direction, in order to achieve long-term sustainable development of enterprises goals