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  • 學位論文

面板廠製程冷卻水改善及外氣空調箱再熱改善之實驗研究

Study focuses on energy-saving to process cooling water system and make-up air unit reheating in display panel manufacturing

指導教授 : 胡石政
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摘要


我國仰賴外購能源佔全國能源用量99%,在全球能源價格不斷上揚的現今,直接衝擊國內各產業的發展,在能源耗用極高的科技產業更是首當其衝,而科技業中面板製造廠更是在能源用量最高的一環,因此降低生產能源成為面板製造廠最重要的課題之ㄧ。 以往在電子產業中,節能手法不外乎探討廠務端的空調、CDA等高能耗的系統,近年來各廠在節能方案上慢慢的遇到了瓶頸,進而希望能將節能的觸角深入至生產設備,本研究將以生產設備中的製程冷卻水來進行調整以及MAU再熱減量調整,本文的目的乃希望能藉由此節能成功案例分享,以達電子製造產業降低能耗的目的,提昇產業競爭力。

關鍵字

Local chiller PCW 能源消耗 MAU FES

並列摘要


Rely on purchased energy of the country's total energy consumption to 99% in global energy prices continue to rise today, the direct impact on the development of domestic industries, energy consumption in high technology industries are particularly affected, while the technology industry panel factory more energy consumption is one of the highest in the ring, thus reducing the production of energy has become the most important issue in the panel manufacturing plant of one In the past of the electron manufacturing industry, the ways of saving energy were nothing more than to confer energy-intensive systems such as facility air conditioning, CDA, exhaust air etc. Somewhat, nowadays factories have slowly encountered a bottleneck, therefore, hope to make equipment also energy-efficient. This study focuses on energy-saving to process cooling water system by simplifying the cooling water loop and make-up air unit reheating adject of energy reduce . By sharing successful examples of three process tools, the aim of this paper is to decrease energy consumption and, therefore, promote industry competitiveness.

參考文獻


[1]孫鴻德,台灣高科技廠節能技術之分析,碩士論文,台北:中原大學電機工程研究所,2011。
[3] 曹志明,高科技廠房空調系統節能策略之研究,博士論文,台北:國立台北科技大學能源與冷凍空調工程研究所,2009。
[4] 陳良銅,電子廠外氣空調箱可能與可行之節能方式,冷凍與空調2001 年1 月。
[6] 陳良銅,外氣空空調箱設計與風車配置特性,冷凍與空調2001 年1 月。
[7] 駱文傑,林照閔,黃雍舜,陳照雄,「12吋半導體晶圓廠房之能耗與能原消耗指標研究」,冷凍空調&能源科技2011 年2 月。

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