Non-MEMS精微加工技術已是精密工業發展的重要關鍵技術之一,但國際上針對CNC精微工具機的體積誤差量測及同動誤差校驗的研究仍非常少,且由於精微工具機機台的尺寸與空間的限制,使得一般接觸式量測無法適用於精微工具機上,然相關技術是精微加工技術普及應用於工業上所必需的。基此,在此研究中將藉由整合影像辨識、影像追蹤、誤差辨識法則、座標轉換、誤差源靈敏度分析及軟體式誤差補償等方法,再搭配機上影像擷取系統及整合控制器資訊,發展可直接安裝於精微工具機上之非接觸式機上誤差量測及補償方法,其具有四項功能:(1)機台體積誤差量測;(2)體積誤差預測與補償;(3)網絡式遠端操控及自動化體積誤差量測;(4)輪廓/循跡誤差校驗。該系統可於精微加工前進行:(1)根據機台體積誤差進行off-line切削路徑誤差補償;(2)進行機上兩軸同動誤差校驗,優化調校同動控制參數。研究針對所發展的量測方法進行誤差源靈敏度分析。同時也進行實際量測系統建立,應用此系統將可進一步地提升精微工具機的精微加工精度。除此之外,研究中也規劃將該系統安裝於研究室所研發的精微工具機上,進行實機切削量測實驗,以驗證其精確性與可靠度。
Non-MEMS micro machining technology has been regarded as one of the key technologies for the development of precision industry. However, very less research efforts had been devoted in developing volumetric error measurement method and synchronous movement error calibration. Due to the workspace constraints of a micro machine tool, the current measurement methods used in industry cannot be applied. With use of image identification/tracking, coordinate transformation, sensitivity analysis, and error identification/compensation, the on-machine micro error measurement, calibration, and compensation methods with use of image capture system and control information were developed in this study. The methods provide 4 main functions: (1) volumetric error measurement, (2)volumetric error compensation, (3) internet-based remote control and automatic measurement (4) contouring/tracking error inspection. The methods can be used before the machining process to improve the machining accuracy, such as: (1) off-line cutting path error compensation, (2) synchronous movement error calibration. In addition to develop the methods and systems, sensitivity analysis was made. Micro machining experiments were conducted on a micro machine tool to verify the feasibility and reliability of the developed system.