微幫浦驅動之微流體晶片的研究

MEMS是整合微電子技術與機械工程行程的一項技術，微機電技術是一門跨領域整合型科學，將機械元件微小化，並與電子、光學、流體元件整合成一微型系統來達到各種不同的功能。微流體系統是生物晶片技術應用領域中一個研究重點，微流體系統整合了微米尺寸之微流道、微幫浦、微閥門、微混合器、微感測器等常見流體控制元件整合於一晶片上針對微小體積流體來做傳輸、循環、分離、混合、程序控制，可用於生化分析、醫學檢測、能源工程、微冷卻等功能。微流體系統最常使用於生物晶片上，生物晶片具有下列幾項優點，如:反應檢測時間短、減少人為操作的錯誤、減少試劑的使用量與具有高穩定性等優點。本文利用SU-8負型光阻做為微流道與微幫浦之結構，使用紫外光硬化樹脂(FP-4272)為薄膜材料，並選用壓電蜂鳴片為致動器，來製作出微幫浦晶片。所有的製程皆在一間普通非無塵室的環境下製作，只使用了一層光罩、旋塗機與簡易型的曝光機便可達到微幫浦晶片的製作，因此整個製程的複雜度降低且能達到低成本的效果。

關鍵字

紫外光硬化樹；聚二甲基矽氧烷；微機電系統技術；微幫浦；壓電片

並列摘要

Micro-electro-mechanical systems (MEMS) integrate microelectronics and mechanical engineering. MEMS technology is a cross-field integrated science that miniaturizes mechanical components and integrates electrical, optical, fluidic components into a miniature system to reach various complicated functions. The microfluidic system is one of the research focuses among the various applications in the field of bio-chip. Microfluidic system basically integrates micro scale microchannel, micropump, microvalve, micromixer, microsensor and common flow control components into one chip to counter miniature size for transmission, circulation, separation, mixing, and process control, and it can be used for biochemical analysis, biomedical detection, energy engineering, and micro-cooling, etc. The most popular application of microfluidic system should be bio-chip. Biochip has the advantages such as shortened detect time, reduced manual errors, reduced consumption of sample, and high stability. In this study, we used SU-8 negative photoresist as main structure layer material and UV adhesive FP-4272 as diaphragm material, and used the piezoceramic buzzer as actuator to produce the micropump chip. All processes are performed in ordinary laboratory: We use only one mask, spin coater and simple exposure machine. Therefore, the manufacture is simple and low cost.

並列關鍵字

UV adhesive ； Polydimethylsiloxane (PDMS) ； Piezoelectric ； Micropump ； Micro-electro-mechanical-systems (MEMS)

參考文獻

[1] Jan G. Smits, “Piezoelectric micropump with three valves working peristaltically,” Sensors and Actuators, A: Physical, Vol. A21-A23, 1990, p 203-206

[4] N. T. Nguyen, X. Huang, and T. K. Chuan, “MEMS-micropumps A review,” Journal of Fluids Engineering, Transactions of the ASME, v 124, n 2, 2002, p 384-392

[5] P. Woias, ” Micropumps—past, progress and future prospects,” Sensors and Actuators, B: Chemical, v 105, n 1, Feb 14, 2005, p 28-38

[6] R. Zengerle, A. Richter, and H. Sandmaier, “A micro membrane pump with electrostatic actuation,” Proc IEEE Micro Electro Mech Syst Workshop, 1992, p 19-24

[7] T. S. J. Lammerink, M. Elwenspoek, and J. H. J. Fluitman, “Intergrated micro liquid dosing system,” IEEE Micro Electro Mechanical Systems, 1993, p 254-259

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微幫浦驅動之微流體晶片的研究

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