利用奈米壓印技術製作奈米多通道有機薄膜電晶體

Fabrication of Nano-Multiple Channel for Organic Thin Film Transistors by Nanoimprint Technology

劉彥邦(Yan-Bang Liu)

指導教授 ： 陳建亨

國立暨南國際大學/科技學院/電機工程學系/碩士(2011年)

https://doi.org/10.6837/NCNU.2011.00035

摘要

本論文研究奈米壓印與軟性模具製作有機薄膜電晶體，首先利用E-beam 和 TMAH 顯影製作奈米模具，接下來利用奈米壓印實驗，將模具圖案轉移至ETFE薄膜上，之後在轉印至UV 感光光阻，然後利用氧電漿去除奈米壓印殘餘層，接著利用金屬蝕刻機產生鋁的奈米多通道，來加以輔助pentacene 成長的分子優選取向成長。
我們成功的複製線寬100 nm，深寬比約為1：2 的ETFE 軟性材料，再利用UV 奈米壓印技術做出100/500 nm 的鋁多通道。再將介電層(parylene)與主動層(pentacene)利用熱沉積在鋁多通道形成有機薄膜電晶體。使用奈米參數量測HP4156 與HP4284 來量測有機薄膜電晶體電特性。而本實驗在未來將有可能發展roll-to-roll 製程來製作軟性薄膜電晶體。

關鍵字

奈米壓印 ； 五環素 ； ETFE

並列摘要

The organic thin film transistors (OTFTs) have become the potential candidates for low-cost and flexible electronics application. We introduce a new strategy for controlling the in-plane orientation of pentacene molecules using nanometer-scale periodic groove patterns as an alignment layer.
First, the ETFE molds with the line width about 100nm and aspect ratio about 1:2 were fabricated successfully. Then, the Al nano-grooves with the line/space of 100/500 nm were fabricated by UV nano imprint and reactive ion etching. Then the dielectrics parylene was deposited and the pentacene OTFTs were fabricated by thermal evaporation. The electrical characterizations of organic thin film transistors with different nano-channel structures were measured by HP4156, HP4284.
This process will be suitable for the future roll-to-roll process for the flexible electronics.

並列關鍵字

nanoimprint ； pentacene ； ETFE

參考文獻

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