奈米多通道有機薄膜電晶體之研究

The Study of Organic Thin Film Transistors with Multiple Nano Channels

陳俊宇(Jun-Yu Chen)

指導教授 ： 陳建亨

國立暨南國際大學/科技學院/電機工程學系/碩士(2011年)

摘要

本論文研究奈米壓印製作奈米多通道有機薄膜電晶體(OTFTs)，研究有機修飾層對OTFT 性能的影響，並評估利用奈米多通道做為對準層來控制pentacene分子成長的優先取向之可行性。
首先探討無機介電層(SiO2)與各種有機修飾層表面特性對元件電特性的影響，接著探討奈米多通道結構對OTFT 元件特性之影響，在有機修飾層(PAK-01-200)上形成奈米多通道，並沉積pentacene 於具有奈米多通道的修飾層上，最後分析奈米多通道對OTFT 載子傳輸的影響。另外，並藉由奈米壓印以及蝕刻方式製備奈米多通道鋁電極，最後使用SEM 與AFM 觀察pentacene 之表面結構，以了解奈米通道結構對pentacene 薄膜成長之影響。
實驗結果顯示，我們成功的製作出各種線寬/間距的奈米多通道，此外，具有OTS-C18 修飾層的元件相較於其它修飾層元件有較佳的元件特性，包括超過0.38cm2/Vs 的載子遷移率以及電流開關比大於107。而在奈米多通道方面，線寬間距為1：2 的通道結構其電性優於單通道，其中以800 nm/1600 nm 這組最佳，包括超過0.013cm2/Vs 的載子遷移率以及電流開關比大於104。

關鍵字

奈米壓印 ； 五環素 ； 自組裝單分子層

並列摘要

In this thesis, the chanacteristics of organic thin film transistors(OTFTs) with surface modification layers and multiple nano channels were studied.
First, the electrical characteristics of pentacene OTFTs on inorganic dielectrics(SiO2) and organic modification layers were studied. Then, The nano structures were fabricated on organic modification layers(PAK-01-200) by nono imprint technology. Following, pentacene was deposited on modified nano channel and the electrical character of OTFTs were studied. Beside, the aluminum gate were fabricated with the nano-multiple channels by nano-imprint and reactive ion etching(RIE). Finally, the channels of pentacene structure was investigated by scanning electron microscope(SEM) and atomic force microscopy (AFM).
As the result, the nano channels with the various line width/space were fabricated successfully. The OTFTs with modification layer of OTS-C18 exhibited excellent electrical characteristics, including high mobility of above 0.38 cm2/Vs, on/off ratio above 107. Beside, the modification layer of PAK-01-200 with line/space width of 1：2 exhibited excellent electrical characteristics, including mobility of above 0.013 cm2/Vs, on/off ratio above 104.

並列關鍵字

nano imprint ； pentacene ； self-assemble monolayers(SAMs)

參考文獻

[1] G. Horowitz, “Organic Thin Film Transistors: From Theory to Real Devices”, J. Mat. Res. 19, pp. 1946(2004).

[2] C. J. Brabec, N. S. Sariciftci, and J. C. Hummelen, “Plastic Solar Cells”,Adv. Funct. Mater. 11, pp. 15(2001).

[3] T. Dobbertin, M. Kroeger, D. Heithecker, D. Schneider, D. Metzdorf, H. Neuner, E. Becker, H.-H. Johannes, and W. Kowalsky,“Inverted Top-Emitting Organic Diodes Using Sputter-Deposited Anodes ”, Appl. Phys. Lett. 82, pp. 284(2003).

[4] C. D. Dimitrakopoulos, and D. J. Mascaro, “Organic thin-film transistors: A review of recent advances,” IBM J. RES. & DEV. VOL. 45, NO. 1(2001).

[5] D.J. Gundlach, Y. Y. Lin, T. N. Jackson, S. F. Nelson, and D. G. Schlom, "Pentacene organic thin-film transistors-molecular ordering and mobility", IEEE Electron Device Lett.,18, 87(1997).