多孔性陽極氧化鋁模板製備一維奈米線之研究

Fabricating Nano-Scale Wires with Anodic Alumina Oxide as Template

陳李瑋(Lee-Wei Chen)

指導教授 ： 郭金國 ； 莊謙本

國立臺灣師範大學/科技學院/工業教育學系/碩士(2006年)

摘要

本研究在99.7%的鋁基材上製備出不同參數的陽極氧化鋁(AAO)模板：分別利用草酸及硫酸兩種不同電解液獲得直徑80nm與30nm尺寸大小的孔洞。

之後再利用直流電壓定電流電鍍和脈衝式電壓電鍍兩種方式進行電化學沉積，以陽極氧化鋁模板做為基板，將銀及銅離子填入模板內，並製得陣列式金屬銀、銅奈米線材。

將所製得的陣列式金屬銀、銅奈米線材進行微結構的分析，而其分析結果是利用掃瞄式電子顯微鏡(SEM)與原子力顯微鏡(AFM)作表面型態及膜厚量測，另外再利用X-光繞射分析儀(XRD)與能量成份分析儀(EDS)分析其晶體結構與元素成份等。未來研究也將針對於奈米銀、銅線做電性量測分析。

關鍵字

陣列式奈米線材

並列摘要

This research based on the fabrication of anode aluminum oxide (AAO) template with different parameters and the 99.7% aluminum plank. The two-hole-size aluminum plank is obtained by the two electrolytes、oxalic acid and sulfuric acid.

The second phase of electrochemistry deposition is conducted by the constant-current electroplate and impulse-voltage electroplate. The foundation plate for deposition is the anode aluminum oxide template. The silver and copper nano-array- wire is obtained by filling the plate with Ag and Cu atom.

Afterward、the microstructure analysis of Nanowires had been performed. The surface appearance and thickness of galvanized membrane were analyzed by the scanning electron microscope and the atom force microscopy. The crystal structure and element components were analyzed by the X-ray diffraction. The electronic properties of sliver oxide and copper oxide will be measured in the future.

並列關鍵字

nano-array- wire

參考文獻

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