精密填蠟金屬沉積之陣列微孔製作

Fabrication of Micro Holes Array by Precision Filled Wax Metal Deposition

羅智昇(Tsu-Sheng Luo)

指導教授 ： 陳順同

國立臺灣師範大學/科技學院/機電科技研究所/碩士(2009年)

摘要

微型孔或陣列微型孔使用範圍非常廣泛，如微型噴油器、CPU散熱器、紡紗機導紗噴嘴、微油霧器及微霧化器等微型製品，都需應用微型孔。本研究主要目的在呈現一種陣列微孔的新製程技術—『精密填蠟電鑄法』。此項新製程以微加工技術為主軸，配合犧牲層的充填及精密電鑄法，開發陣列微型孔。實驗之初，先利用深孔放電加工法，對鏡面不銹鋼基材進行放電鑽孔加工，加工完成的基材置入擠製模具中，再以58°C的擠製溫度將軟化的蠟由陣列微孔擠出，完成的陣列蠟模以精密電鑄法進行金屬沉積，沉積的厚度視沉積時間的長短決定。最後，試片再以80°C的熱水浸泡，將陣列蠟模去除，即可獲得高精度陣列微孔的結構。由實驗結果顯示，擠製的蠟模具有優異的耐酸性、耐熱性及良好的去除性。陣列微孔平均直徑0.13mm，形狀精度佳。此法具生產速度快與製作費用低廉的優點，對多樣性產品開發可行性極高。

關鍵字

蠟 ； 擠製 ； 精密金屬沉積 ； 微孔放電

並列摘要

The major purpose of the study presents a novel fabrication approach for machining micro holes array—“Precision Filled Wax Electroforming”. A set of micro holes array with 170 µm diameter is fabricated using micro processes that including micro EDM hole-drilling, filling sacrificial material, precision electroforming and stripping. First of all, the substrate that is made of mirror SUS304 is EDM drilling, then, the softened wax in the guide tube is extruded through the micro holes on the substrate. The wax is formed with micro precision cylindrical shape. The wax is as the electroforming mole and deposited a layer of metal. Finally, the structure with micro holes array is obtained after the wax is melted and cleaned inside the work part by hot water. Experimental data show that the wax mold has excellent acid-resisting, heat-resisting and perfect stripping. The average hole diameter of the finished micro holes array is 0.17mm as well as ideal form accuracy. The proposed approach can significantly contribute to the precision machining industry.

並列關鍵字

Wax ； extrusion ； precision electroforming ； micro EDM hole-drilling

參考文獻

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